Scribing and cutting of sapphire wafer with Q-switched Nd:YAG laser

Transparent and hard materials such as sapphire are used for many industrial applications such as optical windows, hard materials on mechanical contact against abrasion, and buffer materials for semiconductor emitting device etc. Even the harder materials such as diamond are usually used to scribe a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Jong-Moo Lee, Ki-Young Um, Ki-Gwan Han, Jun-Ho Jang, Tae-Kyung Yoo
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 367 vol.2
container_issue
container_start_page 366
container_title
container_volume 2
creator Jong-Moo Lee
Ki-Young Um
Ki-Gwan Han
Jun-Ho Jang
Tae-Kyung Yoo
description Transparent and hard materials such as sapphire are used for many industrial applications such as optical windows, hard materials on mechanical contact against abrasion, and buffer materials for semiconductor emitting device etc. Even the harder materials such as diamond are usually used to scribe and cut the materials to be used for various applications, while it has a problem of abrasion of the harder material itself and a problem of limit in shape of cut. The material is also known to be cut by the laser with very high peak power or with a wavelength possible to be easily absorbed in the material. But the lasers are usually accompanied with an economical problem of their high cost. We demonstrated, for the first time in my knowledge, that transparent materials can be scribed and cut freely by sparks induced by a Q-switched Nd:YAG laser beam focused on the metal surface.
doi_str_mv 10.1109/CLEOPR.1999.811471
format Conference Proceeding
fullrecord <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_811471</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>811471</ieee_id><sourcerecordid>811471</sourcerecordid><originalsourceid>FETCH-ieee_primary_8114713</originalsourceid><addsrcrecordid>eNpjYJAyNNAzNDSw1Hf2cfUPCNIztLS01LMwNDQxN2Rm4LU0tzAAImNTMzNDAw4G3uLiLAMgMDE1NDEz42RwDk4uykzKzEtXSMxLUUguLSkBsfPTFIoTCwoyMotSFcoT01KLFMozSzIUAnWLgXRyRmqKgl-KVaSju0JOYnFqEQ8Da1piTnEqL5TmZpBycw1x9tDNTE1NjS8oysxNLKqMh7jIGK8kAJFXObY</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Scribing and cutting of sapphire wafer with Q-switched Nd:YAG laser</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Jong-Moo Lee ; Ki-Young Um ; Ki-Gwan Han ; Jun-Ho Jang ; Tae-Kyung Yoo</creator><creatorcontrib>Jong-Moo Lee ; Ki-Young Um ; Ki-Gwan Han ; Jun-Ho Jang ; Tae-Kyung Yoo</creatorcontrib><description>Transparent and hard materials such as sapphire are used for many industrial applications such as optical windows, hard materials on mechanical contact against abrasion, and buffer materials for semiconductor emitting device etc. Even the harder materials such as diamond are usually used to scribe and cut the materials to be used for various applications, while it has a problem of abrasion of the harder material itself and a problem of limit in shape of cut. The material is also known to be cut by the laser with very high peak power or with a wavelength possible to be easily absorbed in the material. But the lasers are usually accompanied with an economical problem of their high cost. We demonstrated, for the first time in my knowledge, that transparent materials can be scribed and cut freely by sparks induced by a Q-switched Nd:YAG laser beam focused on the metal surface.</description><identifier>ISBN: 9780780356610</identifier><identifier>ISBN: 0780356616</identifier><identifier>DOI: 10.1109/CLEOPR.1999.811471</identifier><language>eng</language><publisher>IEEE</publisher><subject>Laser beam cutting ; Optical buffering ; Optical devices ; Optical materials ; Power lasers ; Semiconductor lasers ; Semiconductor materials ; Shape ; Stimulated emission ; Surface emitting lasers</subject><ispartof>Technical Digest. CLEO/Pacific Rim '99. Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.99TH8464), 1999, Vol.2, p.366-367 vol.2</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/811471$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,4036,4037,27902,54895</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/811471$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Jong-Moo Lee</creatorcontrib><creatorcontrib>Ki-Young Um</creatorcontrib><creatorcontrib>Ki-Gwan Han</creatorcontrib><creatorcontrib>Jun-Ho Jang</creatorcontrib><creatorcontrib>Tae-Kyung Yoo</creatorcontrib><title>Scribing and cutting of sapphire wafer with Q-switched Nd:YAG laser</title><title>Technical Digest. CLEO/Pacific Rim '99. Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.99TH8464)</title><addtitle>CLEOPR</addtitle><description>Transparent and hard materials such as sapphire are used for many industrial applications such as optical windows, hard materials on mechanical contact against abrasion, and buffer materials for semiconductor emitting device etc. Even the harder materials such as diamond are usually used to scribe and cut the materials to be used for various applications, while it has a problem of abrasion of the harder material itself and a problem of limit in shape of cut. The material is also known to be cut by the laser with very high peak power or with a wavelength possible to be easily absorbed in the material. But the lasers are usually accompanied with an economical problem of their high cost. We demonstrated, for the first time in my knowledge, that transparent materials can be scribed and cut freely by sparks induced by a Q-switched Nd:YAG laser beam focused on the metal surface.</description><subject>Laser beam cutting</subject><subject>Optical buffering</subject><subject>Optical devices</subject><subject>Optical materials</subject><subject>Power lasers</subject><subject>Semiconductor lasers</subject><subject>Semiconductor materials</subject><subject>Shape</subject><subject>Stimulated emission</subject><subject>Surface emitting lasers</subject><isbn>9780780356610</isbn><isbn>0780356616</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1999</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpjYJAyNNAzNDSw1Hf2cfUPCNIztLS01LMwNDQxN2Rm4LU0tzAAImNTMzNDAw4G3uLiLAMgMDE1NDEz42RwDk4uykzKzEtXSMxLUUguLSkBsfPTFIoTCwoyMotSFcoT01KLFMozSzIUAnWLgXRyRmqKgl-KVaSju0JOYnFqEQ8Da1piTnEqL5TmZpBycw1x9tDNTE1NjS8oysxNLKqMh7jIGK8kAJFXObY</recordid><startdate>1999</startdate><enddate>1999</enddate><creator>Jong-Moo Lee</creator><creator>Ki-Young Um</creator><creator>Ki-Gwan Han</creator><creator>Jun-Ho Jang</creator><creator>Tae-Kyung Yoo</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1999</creationdate><title>Scribing and cutting of sapphire wafer with Q-switched Nd:YAG laser</title><author>Jong-Moo Lee ; Ki-Young Um ; Ki-Gwan Han ; Jun-Ho Jang ; Tae-Kyung Yoo</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-ieee_primary_8114713</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1999</creationdate><topic>Laser beam cutting</topic><topic>Optical buffering</topic><topic>Optical devices</topic><topic>Optical materials</topic><topic>Power lasers</topic><topic>Semiconductor lasers</topic><topic>Semiconductor materials</topic><topic>Shape</topic><topic>Stimulated emission</topic><topic>Surface emitting lasers</topic><toplevel>online_resources</toplevel><creatorcontrib>Jong-Moo Lee</creatorcontrib><creatorcontrib>Ki-Young Um</creatorcontrib><creatorcontrib>Ki-Gwan Han</creatorcontrib><creatorcontrib>Jun-Ho Jang</creatorcontrib><creatorcontrib>Tae-Kyung Yoo</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Jong-Moo Lee</au><au>Ki-Young Um</au><au>Ki-Gwan Han</au><au>Jun-Ho Jang</au><au>Tae-Kyung Yoo</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Scribing and cutting of sapphire wafer with Q-switched Nd:YAG laser</atitle><btitle>Technical Digest. CLEO/Pacific Rim '99. Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.99TH8464)</btitle><stitle>CLEOPR</stitle><date>1999</date><risdate>1999</risdate><volume>2</volume><spage>366</spage><epage>367 vol.2</epage><pages>366-367 vol.2</pages><isbn>9780780356610</isbn><isbn>0780356616</isbn><abstract>Transparent and hard materials such as sapphire are used for many industrial applications such as optical windows, hard materials on mechanical contact against abrasion, and buffer materials for semiconductor emitting device etc. Even the harder materials such as diamond are usually used to scribe and cut the materials to be used for various applications, while it has a problem of abrasion of the harder material itself and a problem of limit in shape of cut. The material is also known to be cut by the laser with very high peak power or with a wavelength possible to be easily absorbed in the material. But the lasers are usually accompanied with an economical problem of their high cost. We demonstrated, for the first time in my knowledge, that transparent materials can be scribed and cut freely by sparks induced by a Q-switched Nd:YAG laser beam focused on the metal surface.</abstract><pub>IEEE</pub><doi>10.1109/CLEOPR.1999.811471</doi></addata></record>
fulltext fulltext_linktorsrc
identifier ISBN: 9780780356610
ispartof Technical Digest. CLEO/Pacific Rim '99. Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.99TH8464), 1999, Vol.2, p.366-367 vol.2
issn
language eng
recordid cdi_ieee_primary_811471
source IEEE Electronic Library (IEL) Conference Proceedings
subjects Laser beam cutting
Optical buffering
Optical devices
Optical materials
Power lasers
Semiconductor lasers
Semiconductor materials
Shape
Stimulated emission
Surface emitting lasers
title Scribing and cutting of sapphire wafer with Q-switched Nd:YAG laser
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-03T01%3A02%3A09IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Scribing%20and%20cutting%20of%20sapphire%20wafer%20with%20Q-switched%20Nd:YAG%20laser&rft.btitle=Technical%20Digest.%20CLEO/Pacific%20Rim%20'99.%20Pacific%20Rim%20Conference%20on%20Lasers%20and%20Electro-Optics%20(Cat.%20No.99TH8464)&rft.au=Jong-Moo%20Lee&rft.date=1999&rft.volume=2&rft.spage=366&rft.epage=367%20vol.2&rft.pages=366-367%20vol.2&rft.isbn=9780780356610&rft.isbn_list=0780356616&rft_id=info:doi/10.1109/CLEOPR.1999.811471&rft_dat=%3Cieee_6IE%3E811471%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=811471&rfr_iscdi=true