Scribing and cutting of sapphire wafer with Q-switched Nd:YAG laser
Transparent and hard materials such as sapphire are used for many industrial applications such as optical windows, hard materials on mechanical contact against abrasion, and buffer materials for semiconductor emitting device etc. Even the harder materials such as diamond are usually used to scribe a...
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creator | Jong-Moo Lee Ki-Young Um Ki-Gwan Han Jun-Ho Jang Tae-Kyung Yoo |
description | Transparent and hard materials such as sapphire are used for many industrial applications such as optical windows, hard materials on mechanical contact against abrasion, and buffer materials for semiconductor emitting device etc. Even the harder materials such as diamond are usually used to scribe and cut the materials to be used for various applications, while it has a problem of abrasion of the harder material itself and a problem of limit in shape of cut. The material is also known to be cut by the laser with very high peak power or with a wavelength possible to be easily absorbed in the material. But the lasers are usually accompanied with an economical problem of their high cost. We demonstrated, for the first time in my knowledge, that transparent materials can be scribed and cut freely by sparks induced by a Q-switched Nd:YAG laser beam focused on the metal surface. |
doi_str_mv | 10.1109/CLEOPR.1999.811471 |
format | Conference Proceeding |
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The material is also known to be cut by the laser with very high peak power or with a wavelength possible to be easily absorbed in the material. But the lasers are usually accompanied with an economical problem of their high cost. We demonstrated, for the first time in my knowledge, that transparent materials can be scribed and cut freely by sparks induced by a Q-switched Nd:YAG laser beam focused on the metal surface.</description><identifier>ISBN: 9780780356610</identifier><identifier>ISBN: 0780356616</identifier><identifier>DOI: 10.1109/CLEOPR.1999.811471</identifier><language>eng</language><publisher>IEEE</publisher><subject>Laser beam cutting ; Optical buffering ; Optical devices ; Optical materials ; Power lasers ; Semiconductor lasers ; Semiconductor materials ; Shape ; Stimulated emission ; Surface emitting lasers</subject><ispartof>Technical Digest. CLEO/Pacific Rim '99. Pacific Rim Conference on Lasers and Electro-Optics (Cat. 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We demonstrated, for the first time in my knowledge, that transparent materials can be scribed and cut freely by sparks induced by a Q-switched Nd:YAG laser beam focused on the metal surface.</description><subject>Laser beam cutting</subject><subject>Optical buffering</subject><subject>Optical devices</subject><subject>Optical materials</subject><subject>Power lasers</subject><subject>Semiconductor lasers</subject><subject>Semiconductor materials</subject><subject>Shape</subject><subject>Stimulated emission</subject><subject>Surface emitting lasers</subject><isbn>9780780356610</isbn><isbn>0780356616</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1999</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpjYJAyNNAzNDSw1Hf2cfUPCNIztLS01LMwNDQxN2Rm4LU0tzAAImNTMzNDAw4G3uLiLAMgMDE1NDEz42RwDk4uykzKzEtXSMxLUUguLSkBsfPTFIoTCwoyMotSFcoT01KLFMozSzIUAnWLgXRyRmqKgl-KVaSju0JOYnFqEQ8Da1piTnEqL5TmZpBycw1x9tDNTE1NjS8oysxNLKqMh7jIGK8kAJFXObY</recordid><startdate>1999</startdate><enddate>1999</enddate><creator>Jong-Moo Lee</creator><creator>Ki-Young Um</creator><creator>Ki-Gwan Han</creator><creator>Jun-Ho Jang</creator><creator>Tae-Kyung Yoo</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1999</creationdate><title>Scribing and cutting of sapphire wafer with Q-switched Nd:YAG laser</title><author>Jong-Moo Lee ; Ki-Young Um ; Ki-Gwan Han ; Jun-Ho Jang ; Tae-Kyung Yoo</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-ieee_primary_8114713</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1999</creationdate><topic>Laser beam cutting</topic><topic>Optical buffering</topic><topic>Optical devices</topic><topic>Optical materials</topic><topic>Power lasers</topic><topic>Semiconductor lasers</topic><topic>Semiconductor materials</topic><topic>Shape</topic><topic>Stimulated emission</topic><topic>Surface emitting lasers</topic><toplevel>online_resources</toplevel><creatorcontrib>Jong-Moo Lee</creatorcontrib><creatorcontrib>Ki-Young Um</creatorcontrib><creatorcontrib>Ki-Gwan Han</creatorcontrib><creatorcontrib>Jun-Ho Jang</creatorcontrib><creatorcontrib>Tae-Kyung Yoo</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Jong-Moo Lee</au><au>Ki-Young Um</au><au>Ki-Gwan Han</au><au>Jun-Ho Jang</au><au>Tae-Kyung Yoo</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Scribing and cutting of sapphire wafer with Q-switched Nd:YAG laser</atitle><btitle>Technical Digest. CLEO/Pacific Rim '99. Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.99TH8464)</btitle><stitle>CLEOPR</stitle><date>1999</date><risdate>1999</risdate><volume>2</volume><spage>366</spage><epage>367 vol.2</epage><pages>366-367 vol.2</pages><isbn>9780780356610</isbn><isbn>0780356616</isbn><abstract>Transparent and hard materials such as sapphire are used for many industrial applications such as optical windows, hard materials on mechanical contact against abrasion, and buffer materials for semiconductor emitting device etc. Even the harder materials such as diamond are usually used to scribe and cut the materials to be used for various applications, while it has a problem of abrasion of the harder material itself and a problem of limit in shape of cut. The material is also known to be cut by the laser with very high peak power or with a wavelength possible to be easily absorbed in the material. But the lasers are usually accompanied with an economical problem of their high cost. We demonstrated, for the first time in my knowledge, that transparent materials can be scribed and cut freely by sparks induced by a Q-switched Nd:YAG laser beam focused on the metal surface.</abstract><pub>IEEE</pub><doi>10.1109/CLEOPR.1999.811471</doi></addata></record> |
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ispartof | Technical Digest. CLEO/Pacific Rim '99. Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.99TH8464), 1999, Vol.2, p.366-367 vol.2 |
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language | eng |
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source | IEEE Electronic Library (IEL) Conference Proceedings |
subjects | Laser beam cutting Optical buffering Optical devices Optical materials Power lasers Semiconductor lasers Semiconductor materials Shape Stimulated emission Surface emitting lasers |
title | Scribing and cutting of sapphire wafer with Q-switched Nd:YAG laser |
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