A Switch-Bridge-Based Readout Circuit for Differential Capacitance Measurement in MEMS Resonators

This paper demonstrates a study of a switch-bridge-based readout circuit for differential capacitance measurement in MEMS resonators. The proposed switch-bridge circuit is improved upon a diode-bridge circuit, which is simple, highly sensitive, and environmentally robust. However, the diode-bridge c...

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Veröffentlicht in:	IEEE sensors journal 2017-11, Vol.17 (21), p.6978-6985
Hauptverfasser:	Ding, Xukai, Zhu, Kunpeng, Li, Hongsheng
Format:	Artikel
Sprache:	eng
Schlagworte:	Capacitance Capacitance readout Capacitors Convergence diode-bridge MEMS Micromechanical devices resonator Sensors switch-bridge Switches Switching circuits
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