Technological breakthrough in pad life improvement and its impact on CMP CoC

Many IC fabs have expressed a great deal of interest in CMP pad life improvement with the expectation that improved pad performance will reduce process variability and improve CMP cost-of-consumables (CoC). Critical parameters that impact grooved-pad life and that can reduce pad life variability hav...

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Bibliographische Detailangaben

Hauptverfasser:	Huey, S., Mear, S.T., Yuchun Wang, Jin, R.R., Ceresi, J., Freeman, P., Johnson, D., Vo, T., Eppert, S.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acceleration Atherosclerosis Availability Conducting materials Costs Laboratories Semiconductor device manufacture Stability
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