Wideband Spurious-Free Lithium Niobate RF-MEMS Filters
This paper reports on the demonstration of wideband spurious-free radio frequency micromechanical systems filters based on one-port shear horizontal (SH0) mode lithium niobate (LiNbO3) laterally vibrating resonators (LVRs). The fabricated filter has been demonstrated with an unprecedented spectral r...
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| Veröffentlicht in: | Journal of microelectromechanical systems 2017-08, Vol.26 (4), p.820-828 |
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| creator | Song, Yong-Ha Gong, Songbin |
| description | This paper reports on the demonstration of wideband spurious-free radio frequency micromechanical systems filters based on one-port shear horizontal (SH0) mode lithium niobate (LiNbO3) laterally vibrating resonators (LVRs). The fabricated filter has been demonstrated with an unprecedented spectral range of spurious-free response (290% of the center frequency), a low insertion loss of 2.1 dB, an excellent 30-dB shape factor of 1.48, and a 3-dB fractional bandwidth of 8.9%. The spurious free response is achieved by optimizing the building blocks of the filters, namely the LVRs, and employing a spurious mitigation design based on arraying single resonators with only two electrodes. The low loss and excellent shape factor are enabled by the demonstrated high electromechanical coupling (k t 2 = 16.1%), high quality factor (Q = 1093), and high figure of merit (FoM = 154) of the fabricated resonator arrays. |
| doi_str_mv | 10.1109/JMEMS.2017.2671445 |
| format | Article |
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The fabricated filter has been demonstrated with an unprecedented spectral range of spurious-free response (290% of the center frequency), a low insertion loss of 2.1 dB, an excellent 30-dB shape factor of 1.48, and a 3-dB fractional bandwidth of 8.9%. The spurious free response is achieved by optimizing the building blocks of the filters, namely the LVRs, and employing a spurious mitigation design based on arraying single resonators with only two electrodes. The low loss and excellent shape factor are enabled by the demonstrated high electromechanical coupling (k t 2 = 16.1%), high quality factor (Q = 1093), and high figure of merit (FoM = 154) of the fabricated resonator arrays.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2017.2671445</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Acoustics ; Broadband ; Electrodes ; Figure of merit ; high electromechanical coupling ; Insertion loss ; ladder filters ; laterally vibrating resonators ; Lithium ; Lithium niobate ; Microelectromechanical systems ; piezoelectric resonators ; Q factors ; quality factor ; Radio frequency ; Resonant frequency ; Resonators ; Shape factor ; spurious mode suppression ; Wideband ; wideband filters</subject><ispartof>Journal of microelectromechanical systems, 2017-08, Vol.26 (4), p.820-828</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2017</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c295t-7ac49b073803fc9d6e1e815c4bf1126ff84df621b4bf3b924df04dab91a5d6af3</citedby><cites>FETCH-LOGICAL-c295t-7ac49b073803fc9d6e1e815c4bf1126ff84df621b4bf3b924df04dab91a5d6af3</cites><orcidid>0000-0002-8359-657X</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/7878516$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/7878516$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Song, Yong-Ha</creatorcontrib><creatorcontrib>Gong, Songbin</creatorcontrib><title>Wideband Spurious-Free Lithium Niobate RF-MEMS Filters</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>This paper reports on the demonstration of wideband spurious-free radio frequency micromechanical systems filters based on one-port shear horizontal (SH0) mode lithium niobate (LiNbO3) laterally vibrating resonators (LVRs). The fabricated filter has been demonstrated with an unprecedented spectral range of spurious-free response (290% of the center frequency), a low insertion loss of 2.1 dB, an excellent 30-dB shape factor of 1.48, and a 3-dB fractional bandwidth of 8.9%. The spurious free response is achieved by optimizing the building blocks of the filters, namely the LVRs, and employing a spurious mitigation design based on arraying single resonators with only two electrodes. The low loss and excellent shape factor are enabled by the demonstrated high electromechanical coupling (k t 2 = 16.1%), high quality factor (Q = 1093), and high figure of merit (FoM = 154) of the fabricated resonator arrays.</description><subject>Acoustics</subject><subject>Broadband</subject><subject>Electrodes</subject><subject>Figure of merit</subject><subject>high electromechanical coupling</subject><subject>Insertion loss</subject><subject>ladder filters</subject><subject>laterally vibrating resonators</subject><subject>Lithium</subject><subject>Lithium niobate</subject><subject>Microelectromechanical systems</subject><subject>piezoelectric resonators</subject><subject>Q factors</subject><subject>quality factor</subject><subject>Radio frequency</subject><subject>Resonant frequency</subject><subject>Resonators</subject><subject>Shape factor</subject><subject>spurious mode suppression</subject><subject>Wideband</subject><subject>wideband filters</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kEtLAzEUhYMoWKt_QDcDrqfmZvJcSun4oFWwisuQzCSY0nZqMrPw35va4uo-OOce7ofQNeAJAFZ3z4vZYjkhGMSEcAGUshM0AkWhxMDkae4xE6UAJs7RRUorjLNG8hHin6F11mzbYrkbYuiGVNbRuWIe-q8wbIqX0FnTu-KtLvcRRR3WvYvpEp15s07u6ljH6KOevU8fy_nrw9P0fl42RLG-FKahymJRSVz5RrXcgZPAGmo9AOHeS9p6TsDmRWUVyROmrbEKDGu58dUY3R7u7mL3PbjU61U3xG2O1KDypyq_SLKKHFRN7FKKzutdDBsTfzRgveej__joPR995JNNNwdTcM79G4QUkgGvfgEafWAn</recordid><startdate>20170801</startdate><enddate>20170801</enddate><creator>Song, Yong-Ha</creator><creator>Gong, Songbin</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0002-8359-657X</orcidid></search><sort><creationdate>20170801</creationdate><title>Wideband Spurious-Free Lithium Niobate RF-MEMS Filters</title><author>Song, Yong-Ha ; Gong, Songbin</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c295t-7ac49b073803fc9d6e1e815c4bf1126ff84df621b4bf3b924df04dab91a5d6af3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Acoustics</topic><topic>Broadband</topic><topic>Electrodes</topic><topic>Figure of merit</topic><topic>high electromechanical coupling</topic><topic>Insertion loss</topic><topic>ladder filters</topic><topic>laterally vibrating resonators</topic><topic>Lithium</topic><topic>Lithium niobate</topic><topic>Microelectromechanical systems</topic><topic>piezoelectric resonators</topic><topic>Q factors</topic><topic>quality factor</topic><topic>Radio frequency</topic><topic>Resonant frequency</topic><topic>Resonators</topic><topic>Shape factor</topic><topic>spurious mode suppression</topic><topic>Wideband</topic><topic>wideband filters</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Song, Yong-Ha</creatorcontrib><creatorcontrib>Gong, Songbin</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Song, Yong-Ha</au><au>Gong, Songbin</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Wideband Spurious-Free Lithium Niobate RF-MEMS Filters</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2017-08-01</date><risdate>2017</risdate><volume>26</volume><issue>4</issue><spage>820</spage><epage>828</epage><pages>820-828</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>This paper reports on the demonstration of wideband spurious-free radio frequency micromechanical systems filters based on one-port shear horizontal (SH0) mode lithium niobate (LiNbO3) laterally vibrating resonators (LVRs). The fabricated filter has been demonstrated with an unprecedented spectral range of spurious-free response (290% of the center frequency), a low insertion loss of 2.1 dB, an excellent 30-dB shape factor of 1.48, and a 3-dB fractional bandwidth of 8.9%. The spurious free response is achieved by optimizing the building blocks of the filters, namely the LVRs, and employing a spurious mitigation design based on arraying single resonators with only two electrodes. The low loss and excellent shape factor are enabled by the demonstrated high electromechanical coupling (k t 2 = 16.1%), high quality factor (Q = 1093), and high figure of merit (FoM = 154) of the fabricated resonator arrays.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2017.2671445</doi><tpages>9</tpages><orcidid>https://orcid.org/0000-0002-8359-657X</orcidid></addata></record> |
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| ispartof | Journal of microelectromechanical systems, 2017-08, Vol.26 (4), p.820-828 |
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| source | IEEE Electronic Library (IEL) |
| subjects | Acoustics Broadband Electrodes Figure of merit high electromechanical coupling Insertion loss ladder filters laterally vibrating resonators Lithium Lithium niobate Microelectromechanical systems piezoelectric resonators Q factors quality factor Radio frequency Resonant frequency Resonators Shape factor spurious mode suppression Wideband wideband filters |
| title | Wideband Spurious-Free Lithium Niobate RF-MEMS Filters |
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