Inertial Impaction on MEMS Balance Chips for Real-Time Air Quality Monitoring

This paper reports on integration of microelectromechanical systems (MEMS) balance chips with aerosol inertial impactors for real-time monitoring of airborne particulate matter. Cascade inertial impactors have been extensively used for sampling and size separation of micro to nano-size airborne part...

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Veröffentlicht in:	IEEE sensors journal 2017-04, Vol.17 (8), p.2329-2337
Hauptverfasser:	Mehdizadeh, Emad, Kumar, Varun, Wilson, James C., Pourkamali, Siavash
Format:	Artikel
Sprache:	eng
Schlagworte:	aerosol Aerosols Air monitoring Air quality airborne Airborne particulates Airborne sensing Cascade impactor Chips Environmental monitoring Impactors inertial impaction mass balance MEMS Microbalances Microelectromechanical systems Micromechanical devices Monitoring Optical resonators Outdoor air quality particle count Particulate emissions Radiation counters Real time Real-time systems resonator Resonators Sensors Size separation Substrates thermal-piezoresistive Time measurement
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