Trade-offs in temperature control of fast-ramp RTP systems

Trade-offs in temperature control of fast-ramp rapid thermal processing (RTP) systems from an open-loop optimal input point of view are investigated. Exact tracking of fast ramps with rates such as 250/spl deg/C/sec is usually not possible if other constraints, like actuator saturation and/or limite...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	De Roover, D., Devasia, S.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Actuators Chemical technology Cost function Filters Manufacturing processes Mechanical engineering Rapid thermal processing Temperature control Trajectory Virtual manufacturing
Online-Zugang:	Volltext bestellen
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