Trade-offs in temperature control of fast-ramp RTP systems
Trade-offs in temperature control of fast-ramp rapid thermal processing (RTP) systems from an open-loop optimal input point of view are investigated. Exact tracking of fast ramps with rates such as 250/spl deg/C/sec is usually not possible if other constraints, like actuator saturation and/or limite...
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| creator | De Roover, D. Devasia, S. |
| description | Trade-offs in temperature control of fast-ramp rapid thermal processing (RTP) systems from an open-loop optimal input point of view are investigated. Exact tracking of fast ramps with rates such as 250/spl deg/C/sec is usually not possible if other constraints, like actuator saturation and/or limited temperature overshoot, have to be met. A recently developed trajectory redesign technique allows to trade-off exact tracking versus other limitations in an optimal way. Application of this technique to a model of a generic RTP system exemplifies the possibilities and limitations of fast-ramping temperature control. |
| doi_str_mv | 10.1109/ACC.1999.782743 |
| format | Conference Proceeding |
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Exact tracking of fast ramps with rates such as 250/spl deg/C/sec is usually not possible if other constraints, like actuator saturation and/or limited temperature overshoot, have to be met. A recently developed trajectory redesign technique allows to trade-off exact tracking versus other limitations in an optimal way. 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Application of this technique to a model of a generic RTP system exemplifies the possibilities and limitations of fast-ramping temperature control.</description><subject>Actuators</subject><subject>Chemical technology</subject><subject>Cost function</subject><subject>Filters</subject><subject>Manufacturing processes</subject><subject>Mechanical engineering</subject><subject>Rapid thermal processing</subject><subject>Temperature control</subject><subject>Trajectory</subject><subject>Virtual manufacturing</subject><issn>0743-1619</issn><issn>2378-5861</issn><isbn>9780780349902</isbn><isbn>0780349903</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1999</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj01LxDAURYMfYB1nLbjKH0h9Sdomz91QHBUGFOl-iGkeVKbTksTF_HsrI1y4m3MuXMbuJZRSAj5u2raUiFgaq0ylL1ihtLGito28ZGs0FpboChHUFStgQYRsJN6w25S-ARa1gYI9ddH1QUxEiQ9HnsM4h-jyTwzcT8ccpwOfiJNLWUQ3zvyz--DplBYu3bFrcocU1v-9Yt32uWtfxe795a3d7MRgTRYEtrYUpK2MR2WgV-grjY6k115DQ2hlHZzWnnqv_lj9FQw1tSFpDIJesYfz7BBC2M9xGF087c-n9S-ok0fa</recordid><startdate>1999</startdate><enddate>1999</enddate><creator>De Roover, D.</creator><creator>Devasia, S.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>1999</creationdate><title>Trade-offs in temperature control of fast-ramp RTP systems</title><author>De Roover, D. ; Devasia, S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i87t-f0858fe1847c9270d29c439af1c3c306f9815ea33cfdc2858f3be7f657f177903</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1999</creationdate><topic>Actuators</topic><topic>Chemical technology</topic><topic>Cost function</topic><topic>Filters</topic><topic>Manufacturing processes</topic><topic>Mechanical engineering</topic><topic>Rapid thermal processing</topic><topic>Temperature control</topic><topic>Trajectory</topic><topic>Virtual manufacturing</topic><toplevel>online_resources</toplevel><creatorcontrib>De Roover, D.</creatorcontrib><creatorcontrib>Devasia, S.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>De Roover, D.</au><au>Devasia, S.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Trade-offs in temperature control of fast-ramp RTP systems</atitle><btitle>Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251)</btitle><stitle>ACC</stitle><date>1999</date><risdate>1999</risdate><volume>1</volume><spage>76</spage><epage>80 vol.1</epage><pages>76-80 vol.1</pages><issn>0743-1619</issn><eissn>2378-5861</eissn><isbn>9780780349902</isbn><isbn>0780349903</isbn><abstract>Trade-offs in temperature control of fast-ramp rapid thermal processing (RTP) systems from an open-loop optimal input point of view are investigated. Exact tracking of fast ramps with rates such as 250/spl deg/C/sec is usually not possible if other constraints, like actuator saturation and/or limited temperature overshoot, have to be met. A recently developed trajectory redesign technique allows to trade-off exact tracking versus other limitations in an optimal way. Application of this technique to a model of a generic RTP system exemplifies the possibilities and limitations of fast-ramping temperature control.</abstract><pub>IEEE</pub><doi>10.1109/ACC.1999.782743</doi></addata></record> |
| fulltext | fulltext_linktorsrc |
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| ispartof | Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251), 1999, Vol.1, p.76-80 vol.1 |
| issn | 0743-1619 2378-5861 |
| language | eng |
| recordid | cdi_ieee_primary_782743 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Actuators Chemical technology Cost function Filters Manufacturing processes Mechanical engineering Rapid thermal processing Temperature control Trajectory Virtual manufacturing |
| title | Trade-offs in temperature control of fast-ramp RTP systems |
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