Transformation of axial vacuum-arc plasma flows into radial streams and their use in coating deposition
Radial filtered plasma flow formation in the annular gap between two oppositely directed rectilinear vacuum-arc erosion-plasma sources with magnetic focusing has been investigated. In both the opposing and aiding magnetic field configurations in the gap, the ion how density first increased to a cert...
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| Veröffentlicht in: | IEEE transactions on plasma science 1999-08, Vol.27 (4), p.1026-1029 |
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| container_end_page | 1029 |
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| container_issue | 4 |
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| container_title | IEEE transactions on plasma science |
| container_volume | 27 |
| creator | Aksenov, I.I. Khoroshikh, V.M. Lomino, N.S. Ovcharenko, V.D. Zadneprovskiy, Y.A. |
| description | Radial filtered plasma flow formation in the annular gap between two oppositely directed rectilinear vacuum-arc erosion-plasma sources with magnetic focusing has been investigated. In both the opposing and aiding magnetic field configurations in the gap, the ion how density first increased to a certain maximum value (/spl sim/4 mA/cm/sup 2/ for Ti plasma) and then decreased with magnetic field strength, For this optimum condition the plasma losses during transformation of the axial flow into the radial flow were less than 20% in high vacuum. A uniform deposition rate of /spl sim/5 /spl mu/m/h (for droplet-free Al and Ti coatings) was achieved over the annular substrate surface of 1300 cm/sup 2/. (In case of conventional curvilinear filters this area is generally 10-20 cm/sup 2/). |
| doi_str_mv | 10.1109/27.782275 |
| format | Article |
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In both the opposing and aiding magnetic field configurations in the gap, the ion how density first increased to a certain maximum value (/spl sim/4 mA/cm/sup 2/ for Ti plasma) and then decreased with magnetic field strength, For this optimum condition the plasma losses during transformation of the axial flow into the radial flow were less than 20% in high vacuum. A uniform deposition rate of /spl sim/5 /spl mu/m/h (for droplet-free Al and Ti coatings) was achieved over the annular substrate surface of 1300 cm/sup 2/. 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(IEEE) Aug 1999</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c327t-ddb75cbbab5d9e2c9e87ae9b8bfff5ebe35d3450c299e1e0517a0fe066a0cf143</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/782275$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27923,27924,54757</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/782275$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Aksenov, I.I.</creatorcontrib><creatorcontrib>Khoroshikh, V.M.</creatorcontrib><creatorcontrib>Lomino, N.S.</creatorcontrib><creatorcontrib>Ovcharenko, V.D.</creatorcontrib><creatorcontrib>Zadneprovskiy, Y.A.</creatorcontrib><title>Transformation of axial vacuum-arc plasma flows into radial streams and their use in coating deposition</title><title>IEEE transactions on plasma science</title><addtitle>TPS</addtitle><description>Radial filtered plasma flow formation in the annular gap between two oppositely directed rectilinear vacuum-arc erosion-plasma sources with magnetic focusing has been investigated. In both the opposing and aiding magnetic field configurations in the gap, the ion how density first increased to a certain maximum value (/spl sim/4 mA/cm/sup 2/ for Ti plasma) and then decreased with magnetic field strength, For this optimum condition the plasma losses during transformation of the axial flow into the radial flow were less than 20% in high vacuum. A uniform deposition rate of /spl sim/5 /spl mu/m/h (for droplet-free Al and Ti coatings) was achieved over the annular substrate surface of 1300 cm/sup 2/. (In case of conventional curvilinear filters this area is generally 10-20 cm/sup 2/).</description><subject>Annular</subject><subject>Cathodes</subject><subject>Coating</subject><subject>Coatings</subject><subject>Density</subject><subject>Deposition</subject><subject>Filters</subject><subject>Focusing</subject><subject>Magnetic fields</subject><subject>Magnetic separation</subject><subject>Magnetosphere</subject><subject>Physics</subject><subject>Plasma</subject><subject>Plasma density</subject><subject>Plasma displays</subject><subject>Plasma sources</subject><subject>Plasma transport processes</subject><subject>Titanium</subject><subject>Transformations</subject><issn>0093-3813</issn><issn>1939-9375</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1999</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqN0TlPwzAUwHELgUQ5BlYmiwHEkOKjjuMRVVxSJRaYoxfnGYKSuNgJx7fHpRUDA2Ly4J_-evYj5IizKefMXAg91YUQWm2RCTfSZEZqtU0mjBmZyYLLXbIX4wtjfKaYmJCnhwB9dD50MDS-p95R-GigpW9gx7HLIFi6bCF2QF3r3yNt-sHTAPXKxCEgdJFCX9PhGZtAx4hJUOtTrX-iNS59bFbhA7LjoI14uDn3yeP11cP8Nlvc39zNLxeZlUIPWV1XWtmqgkrVBoU1WGhAUxWVc05hhVLVMk1uhTHIkSmugTlkeQ7MOj6T--Rs3V0G_zpiHMquiRbbFnr0YywNN0aofJYnefqnFEXB0lfO_gFTTmuZ4Mkv-OLH0KfnltwonhvxXTtfIxt8jAFduQxNB-Gz5KxcrbAUulyvMNnjtW0Q8cdtLr8AJMuXwQ</recordid><startdate>19990801</startdate><enddate>19990801</enddate><creator>Aksenov, I.I.</creator><creator>Khoroshikh, V.M.</creator><creator>Lomino, N.S.</creator><creator>Ovcharenko, V.D.</creator><creator>Zadneprovskiy, Y.A.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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In both the opposing and aiding magnetic field configurations in the gap, the ion how density first increased to a certain maximum value (/spl sim/4 mA/cm/sup 2/ for Ti plasma) and then decreased with magnetic field strength, For this optimum condition the plasma losses during transformation of the axial flow into the radial flow were less than 20% in high vacuum. A uniform deposition rate of /spl sim/5 /spl mu/m/h (for droplet-free Al and Ti coatings) was achieved over the annular substrate surface of 1300 cm/sup 2/. (In case of conventional curvilinear filters this area is generally 10-20 cm/sup 2/).</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/27.782275</doi><tpages>4</tpages></addata></record> |
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| issn | 0093-3813 1939-9375 |
| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Annular Cathodes Coating Coatings Density Deposition Filters Focusing Magnetic fields Magnetic separation Magnetosphere Physics Plasma Plasma density Plasma displays Plasma sources Plasma transport processes Titanium Transformations |
| title | Transformation of axial vacuum-arc plasma flows into radial streams and their use in coating deposition |
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