Evanescent microwave probes using coplanar waveguide and stripline for super-resolution imaging of materials
An evanescent field microwave imaging probe based on half-wavelength, microwave transmission line resonators is described. Optimization of the probe tip design, the coupling gap, and the data analysis has resulted in images of metal lines on semiconductor substrates with 2.6 /spl mu/m spatial resolu...
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| container_end_page | 1862 vol.4 |
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| container_volume | 4 |
| creator | Ponchak, E. Akinwande, D. Ciocan, R. LeClair, S.R. Tabib-Azar, M. |
| description | An evanescent field microwave imaging probe based on half-wavelength, microwave transmission line resonators is described. Optimization of the probe tip design, the coupling gap, and the data analysis has resulted in images of metal lines on semiconductor substrates with 2.6 /spl mu/m spatial resolution and a minimum detectable line width of 0.4 /spl mu/m at 1 GHz. |
| doi_str_mv | 10.1109/MWSYM.1999.780335 |
| format | Conference Proceeding |
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Optimization of the probe tip design, the coupling gap, and the data analysis has resulted in images of metal lines on semiconductor substrates with 2.6 /spl mu/m spatial resolution and a minimum detectable line width of 0.4 /spl mu/m at 1 GHz.</description><subject>Coplanar transmission lines</subject><subject>Coplanar waveguides</subject><subject>Couplings</subject><subject>Data analysis</subject><subject>Design optimization</subject><subject>Microwave imaging</subject><subject>Probes</subject><subject>Semiconductor waveguides</subject><subject>Stripline</subject><subject>Substrates</subject><issn>0149-645X</issn><isbn>0780351355</isbn><isbn>9780780351356</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1999</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotkM1OwzAQhC0BEqX0AeDkE7cEO7aT-Iiq8iO14gAIOEWuva6MEjvYSRFvT6qyl1lpZ1fzLUJXlOSUEnm7eX_53ORUSplXNWFMnKALcugEZUKcohmhXGYlFx_naJHSF5mKC14xNkPtaq88JA1-wJ3TMfyoPeA-hi0kPCbnd1iHvlVeRXwY7UZnACtvcBqi61vnAdsQcRp7iFmEFNpxcMFj16ndYTtY3KkBolNtukRndhJY_Oscvd2vXpeP2fr54Wl5t85cwcshA0INVAZAW2kK0BQ4J0TUQoM1FoQEokhdFBS0qPSWaVUIq2wpQRshy5rN0c3x7sTxPUIams5NiO2EAWFMTVEVVBAqJ-P10egAoOnjFDr-Nscnsj_lJWo1</recordid><startdate>1999</startdate><enddate>1999</enddate><creator>Ponchak, E.</creator><creator>Akinwande, D.</creator><creator>Ciocan, R.</creator><creator>LeClair, S.R.</creator><creator>Tabib-Azar, M.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>1999</creationdate><title>Evanescent microwave probes using coplanar waveguide and stripline for super-resolution imaging of materials</title><author>Ponchak, E. ; Akinwande, D. ; Ciocan, R. ; LeClair, S.R. ; Tabib-Azar, M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i246t-e01de7deecf9d2ec1e4400585cefdfe59e0a08221ec57cb3ca25faf69ecd59683</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1999</creationdate><topic>Coplanar transmission lines</topic><topic>Coplanar waveguides</topic><topic>Couplings</topic><topic>Data analysis</topic><topic>Design optimization</topic><topic>Microwave imaging</topic><topic>Probes</topic><topic>Semiconductor waveguides</topic><topic>Stripline</topic><topic>Substrates</topic><toplevel>online_resources</toplevel><creatorcontrib>Ponchak, E.</creatorcontrib><creatorcontrib>Akinwande, D.</creatorcontrib><creatorcontrib>Ciocan, R.</creatorcontrib><creatorcontrib>LeClair, S.R.</creatorcontrib><creatorcontrib>Tabib-Azar, M.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Ponchak, E.</au><au>Akinwande, D.</au><au>Ciocan, R.</au><au>LeClair, S.R.</au><au>Tabib-Azar, M.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Evanescent microwave probes using coplanar waveguide and stripline for super-resolution imaging of materials</atitle><btitle>1999 IEEE MTT-S International Microwave Symposium Digest (Cat. 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| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 0149-645X |
| ispartof | 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282), 1999, Vol.4, p.1859-1862 vol.4 |
| issn | 0149-645X |
| language | eng |
| recordid | cdi_ieee_primary_780335 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Coplanar transmission lines Coplanar waveguides Couplings Data analysis Design optimization Microwave imaging Probes Semiconductor waveguides Stripline Substrates |
| title | Evanescent microwave probes using coplanar waveguide and stripline for super-resolution imaging of materials |
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