Evanescent microwave probes using coplanar waveguide and stripline for super-resolution imaging of materials

Evanescent microwave probes using coplanar waveguide and stripline for super-resolution imaging of materials

An evanescent field microwave imaging probe based on half-wavelength, microwave transmission line resonators is described. Optimization of the probe tip design, the coupling gap, and the data analysis has resulted in images of metal lines on semiconductor substrates with 2.6 /spl mu/m spatial resolu...

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Bibliographische Detailangaben
Hauptverfasser: Ponchak, E., Akinwande, D., Ciocan, R., LeClair, S.R., Tabib-Azar, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Coplanar transmission lines
Coplanar waveguides
Couplings
Data analysis
Design optimization
Microwave imaging
Probes
Semiconductor waveguides
Stripline
Substrates
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Beschreibung
Zusammenfassung:An evanescent field microwave imaging probe based on half-wavelength, microwave transmission line resonators is described. Optimization of the probe tip design, the coupling gap, and the data analysis has resulted in images of metal lines on semiconductor substrates with 2.6 /spl mu/m spatial resolution and a minimum detectable line width of 0.4 /spl mu/m at 1 GHz.
ISSN:0149-645X
DOI:10.1109/MWSYM.1999.780335