Fast Verification of Guide-Patterns for Directed Self-Assembly Lithography

Guide-patterns (GPs) are critical to the construction of contacts and vias in directed self-assembly (DSA) lithography. Simulations can be used to verify GPs, but runtime is excessive. Instead, we categorize the shapes of GPs using a small number of geometric parameters. Then a verification function...

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Veröffentlicht in:	IEEE transactions on computer-aided design of integrated circuits and systems 2017-09, Vol.36 (9), p.1522-1531
Hauptverfasser:	Shim, Seongbo, Shin, Youngsoo
Format:	Artikel
Sprache:	eng
Schlagworte:	Directed self-assembly (DSA) guide-pattern (GP) Integrated circuit modeling Layout Lithography Optical imaging Plastics Self-assembly Shape verification
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