Low-Loss Millimeter-Length Waveguides and Grating Couplers in Single-Crystal Diamond

We report on the design, fabrication, and characterization of millimeter-length strip waveguides with monolithic grating couplers in commercially available synthetic single-crystal diamond. To minimize the device footprint and the influence of the wafer wedge of the single-crystal diamond thin plate...

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Veröffentlicht in:	Journal of lightwave technology 2016-12, Vol.34 (23), p.5576-5582
Hauptverfasser:	Fei Gao, Zhihong Huang, Feigel, Benjamin, Van Erps, Jurgen, Thienpont, Hugo, Beausoleil, Raymond G., Vermeulen, Nathalie
Format:	Artikel
Sprache:	eng
Schlagworte:	Couplers Couplings Diamond Diamonds electron beam lithography Gratings integrated optics Layout Optical device fabrication Optical waveguides proximity effects Single crystals Waveguides
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