Magnetically Levitated Rotary Table With Six Degrees of Freedom

This paper presents a six-degree-of-freedom magnetically levitated rotary table for fine positioning. The table utilizes a moving magnet motor configuration with the Halbach arrays mounted around the perimeter of the table. The actuation forces are achieved by using the Lorentz force, where the coil...

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Veröffentlicht in:	IEEE/ASME transactions on mechatronics 2017-02, Vol.22 (1), p.530-540
Hauptverfasser:	Dyck, Mark, Xiaodong Lu, Altintas, Yusuf
Format:	Artikel
Sprache:	eng
Schlagworte:	Coils Force Halbach array Magnetic fields Magnetic levitation Mechatronics micromachining Optical sensors rotary table six degrees of freedom (DOFs) Stators
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