Integrated array of SAW sensors for gas analysis

A new approach, based on the properties of SAW devices, is used to integrate an array of gas sensors into a single substrate, using a single chemical membrane. The different response of each individual device to the same set of gases is provided by different acoustic propagation conditions, only. Th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Anisimkin, V.I., Fedosov, V.I., Krystal, R.G., Medved, A.V., Zemlyakov, V.E., Verona, E.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acoustic propagation Acoustic sensors Biomembranes Chemical sensors Gas detectors Gases Prototypes Sensor arrays Surface acoustic wave devices Surface acoustic waves
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