Nonlinear feedback control and observer design for the modern effusion cell
In the molecular-beam epitaxy (MBE) process precise control over thickness, composition, and doping profiles are critical for end device performance. This paper addresses the problem of accurately controlling the flux sources (effusion cells) used in MBE. We present a nonlinear compensator based on...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Tagungsbericht |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 468 vol.1 |
|---|---|
| container_issue | |
| container_start_page | 463 |
| container_title | |
| container_volume | 1 |
| creator | Tucker, M.K. Meyer, D.G. |
| description | In the molecular-beam epitaxy (MBE) process precise control over thickness, composition, and doping profiles are critical for end device performance. This paper addresses the problem of accurately controlling the flux sources (effusion cells) used in MBE. We present a nonlinear compensator based on exact input-output linearization via feedback to control the flux of an effusion cell. The unmeasured states, necessary for implementation of the controller, are estimated by a Kalman-Bucy observer. We present simulations of the composite observer/nonlinear controller system, showing successful flux command following and elimination of shutter induced flux transients. |
| doi_str_mv | 10.1109/CDC.1998.760720 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_760720</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>760720</ieee_id><sourcerecordid>760720</sourcerecordid><originalsourceid>FETCH-LOGICAL-i172t-3ffcd4781d3ecf04b71b0028a55d86847eef7cdcbc1f0959a09c67d4083482ff3</originalsourceid><addsrcrecordid>eNotj8tKAzEUQAMqWGvXgqv8wNSbx-SxlPGJRTe6LpnkRqPTRJJR8O8VKhw4uwOHkDMGa8bAXgxXw5pZa9ZageZwQFZWG_hDSGGlOSQLYJZ1nDN1TE5aewcAA0otyMNjyVPK6CqNiGF0_oP6kudaJupyoGVsWL-x0oAtvWYaS6XzG9JdCVgzxRi_WiqZepymU3IU3dRw9e8lebm5fh7uus3T7f1wuekS03zuRIw-SG1YEOgjyFGzEYAb1_fBKCM1YtQ--NGzCLa3DqxXOkgwQhoeo1iS8303IeL2s6adqz_b_br4BQ4wTVc</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Nonlinear feedback control and observer design for the modern effusion cell</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Tucker, M.K. ; Meyer, D.G.</creator><creatorcontrib>Tucker, M.K. ; Meyer, D.G.</creatorcontrib><description>In the molecular-beam epitaxy (MBE) process precise control over thickness, composition, and doping profiles are critical for end device performance. This paper addresses the problem of accurately controlling the flux sources (effusion cells) used in MBE. We present a nonlinear compensator based on exact input-output linearization via feedback to control the flux of an effusion cell. The unmeasured states, necessary for implementation of the controller, are estimated by a Kalman-Bucy observer. We present simulations of the composite observer/nonlinear controller system, showing successful flux command following and elimination of shutter induced flux transients.</description><identifier>ISSN: 0191-2216</identifier><identifier>ISBN: 9780780343948</identifier><identifier>ISBN: 0780343948</identifier><identifier>DOI: 10.1109/CDC.1998.760720</identifier><language>eng</language><publisher>IEEE</publisher><subject>Control system synthesis ; Doping profiles ; Feedback control ; Linear feedback control systems ; Molecular beam epitaxial growth ; Nonlinear control systems ; Observers ; Process control ; State estimation ; Thickness control</subject><ispartof>Proceedings of the 37th IEEE Conference on Decision and Control (Cat. No.98CH36171), 1998, Vol.1, p.463-468 vol.1</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/760720$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,4050,4051,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/760720$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Tucker, M.K.</creatorcontrib><creatorcontrib>Meyer, D.G.</creatorcontrib><title>Nonlinear feedback control and observer design for the modern effusion cell</title><title>Proceedings of the 37th IEEE Conference on Decision and Control (Cat. No.98CH36171)</title><addtitle>CDC</addtitle><description>In the molecular-beam epitaxy (MBE) process precise control over thickness, composition, and doping profiles are critical for end device performance. This paper addresses the problem of accurately controlling the flux sources (effusion cells) used in MBE. We present a nonlinear compensator based on exact input-output linearization via feedback to control the flux of an effusion cell. The unmeasured states, necessary for implementation of the controller, are estimated by a Kalman-Bucy observer. We present simulations of the composite observer/nonlinear controller system, showing successful flux command following and elimination of shutter induced flux transients.</description><subject>Control system synthesis</subject><subject>Doping profiles</subject><subject>Feedback control</subject><subject>Linear feedback control systems</subject><subject>Molecular beam epitaxial growth</subject><subject>Nonlinear control systems</subject><subject>Observers</subject><subject>Process control</subject><subject>State estimation</subject><subject>Thickness control</subject><issn>0191-2216</issn><isbn>9780780343948</isbn><isbn>0780343948</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1998</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj8tKAzEUQAMqWGvXgqv8wNSbx-SxlPGJRTe6LpnkRqPTRJJR8O8VKhw4uwOHkDMGa8bAXgxXw5pZa9ZageZwQFZWG_hDSGGlOSQLYJZ1nDN1TE5aewcAA0otyMNjyVPK6CqNiGF0_oP6kudaJupyoGVsWL-x0oAtvWYaS6XzG9JdCVgzxRi_WiqZepymU3IU3dRw9e8lebm5fh7uus3T7f1wuekS03zuRIw-SG1YEOgjyFGzEYAb1_fBKCM1YtQ--NGzCLa3DqxXOkgwQhoeo1iS8303IeL2s6adqz_b_br4BQ4wTVc</recordid><startdate>1998</startdate><enddate>1998</enddate><creator>Tucker, M.K.</creator><creator>Meyer, D.G.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>1998</creationdate><title>Nonlinear feedback control and observer design for the modern effusion cell</title><author>Tucker, M.K. ; Meyer, D.G.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i172t-3ffcd4781d3ecf04b71b0028a55d86847eef7cdcbc1f0959a09c67d4083482ff3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1998</creationdate><topic>Control system synthesis</topic><topic>Doping profiles</topic><topic>Feedback control</topic><topic>Linear feedback control systems</topic><topic>Molecular beam epitaxial growth</topic><topic>Nonlinear control systems</topic><topic>Observers</topic><topic>Process control</topic><topic>State estimation</topic><topic>Thickness control</topic><toplevel>online_resources</toplevel><creatorcontrib>Tucker, M.K.</creatorcontrib><creatorcontrib>Meyer, D.G.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Tucker, M.K.</au><au>Meyer, D.G.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Nonlinear feedback control and observer design for the modern effusion cell</atitle><btitle>Proceedings of the 37th IEEE Conference on Decision and Control (Cat. No.98CH36171)</btitle><stitle>CDC</stitle><date>1998</date><risdate>1998</risdate><volume>1</volume><spage>463</spage><epage>468 vol.1</epage><pages>463-468 vol.1</pages><issn>0191-2216</issn><isbn>9780780343948</isbn><isbn>0780343948</isbn><abstract>In the molecular-beam epitaxy (MBE) process precise control over thickness, composition, and doping profiles are critical for end device performance. This paper addresses the problem of accurately controlling the flux sources (effusion cells) used in MBE. We present a nonlinear compensator based on exact input-output linearization via feedback to control the flux of an effusion cell. The unmeasured states, necessary for implementation of the controller, are estimated by a Kalman-Bucy observer. We present simulations of the composite observer/nonlinear controller system, showing successful flux command following and elimination of shutter induced flux transients.</abstract><pub>IEEE</pub><doi>10.1109/CDC.1998.760720</doi></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 0191-2216 |
| ispartof | Proceedings of the 37th IEEE Conference on Decision and Control (Cat. No.98CH36171), 1998, Vol.1, p.463-468 vol.1 |
| issn | 0191-2216 |
| language | eng |
| recordid | cdi_ieee_primary_760720 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Control system synthesis Doping profiles Feedback control Linear feedback control systems Molecular beam epitaxial growth Nonlinear control systems Observers Process control State estimation Thickness control |
| title | Nonlinear feedback control and observer design for the modern effusion cell |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-04T04%3A49%3A49IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Nonlinear%20feedback%20control%20and%20observer%20design%20for%20the%20modern%20effusion%20cell&rft.btitle=Proceedings%20of%20the%2037th%20IEEE%20Conference%20on%20Decision%20and%20Control%20(Cat.%20No.98CH36171)&rft.au=Tucker,%20M.K.&rft.date=1998&rft.volume=1&rft.spage=463&rft.epage=468%20vol.1&rft.pages=463-468%20vol.1&rft.issn=0191-2216&rft.isbn=9780780343948&rft.isbn_list=0780343948&rft_id=info:doi/10.1109/CDC.1998.760720&rft_dat=%3Cieee_6IE%3E760720%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=760720&rfr_iscdi=true |