Two-Level Nested Control Chart for Batch Process in the Semiconductor Manufacturing

Traditional variables control charts assume that process data is independently identically normally distributed (IIND). Some real-world processes, however, do not obey this convenient assumption. The semiconductor industry is very familiar with non-IIND distributions. The batch processes in the semi...

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Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 2016-11, Vol.29 (4), p.399-410
Hauptverfasser:	Tian, Wenxing, You, Hailong, Gu, Kai, Zhang, Chunfu, Jia, Xinzhang
Format:	Artikel
Sprache:	eng
Schlagworte:	batch process Batch processes Batch processing Batch production systems Control charts False alarms Manufacturing nested variation Process control Quality control Real variables Semiconductor device measurement Semiconductor device modeling statistical process control two-level nested control chart
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