Correction "Bimorph Piezoelectric Micromachined Ultrasonic Transducers" [Apr 16 326-336]

Correction "Bimorph Piezoelectric Micromachined Ultrasonic Transducers" [Apr 16 326-336]

This paper points out the small typographical author errors found in the above paper [1] to eliminate any confusion for the readers.

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Bibliographische Detailangaben
Veröffentlicht in:Journal of microelectromechanical systems 2016-06, Vol.25 (3), p.579-580
Hauptverfasser: Akhbari, Sina, Sammoura, Firas, Eovino, Benjamin, Yang, Chen, Lin, Liwei
Format: Artikel
Sprache:eng
Schlagworte:
Bimorphs
CMOS technology
Confusion
Microelectrodes
Microelectromechanical systems
Micromachining
Micromechanics
Piezoelectric transducers
Piezoelectricity
Prototypes
Readers
Transducers
Ultrasonic transducers
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Beschreibung
Zusammenfassung:This paper points out the small typographical author errors found in the above paper [1] to eliminate any confusion for the readers.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2016.2547950