Microhydraulic Electrowetting Actuators

The conversion of electrical to mechanical power on a sub-centimeter scale is a key technology in many microsystems and energy harvesting devices. In this paper, we present a type of a capacitive energy conversion device that uses capillary pressure and electrowetting to reversibly convert electrica...

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Veröffentlicht in:	Journal of microelectromechanical systems 2016-04, Vol.25 (2), p.394-400
Hauptverfasser:	Kedzierski, Jakub, Meng, Kevin, Thorsen, Todd, Cabrera, Rafmag, Berry, Shaun
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation actuator Actuators Capacitance Capacitors Capillarity Capillary pressure Density measurement Devices Electric power generation electrocapillary electrowetting energy conversion Energy harvesting Frequency measurement Hydraulics Lead microfluidics Microhydraulics microrobotics microsystems PDMS porous materials Power system measurements soft robotics
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