Experimental research on semiconductor film deposition by filtered vacuum arcs

Vacuum arc deposition (VAD) is efficient way for different kinds of film fabrication. By means of a magnetic filter, a well deigned VAD system can produce macroparticle free films with desirable deposition rate. In order to fabricate semiconductor films, the authors designed and built a filtered vac...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	Zho Jiyan, Lin Chun, Zheng Zhitao, Geoffery, C.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Arcs, sparks, lightning Coils Cross-disciplinary physics: materials science rheology Discharge in vacuum Electric discharges Electromagnetic fields Electrons Exact sciences and technology Fabrication Filters Magnetic films Magnetic separation Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Semiconductor films Vacuum arcs Vacuum deposition Vacuum systems
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!