Fabrication technologies for terahertz waveguide

Terahertz waveguide components can now be realised using a variety of methods. The size and geometry of waveguide at terahertz frequencies ideally lends itself to fabrication via a number of micromachining techniques. The use of micromachining allows the realisation of waveguide components that cannot be fabricated via conventional machining at these frequencies. Conventional machining should not, however, be overlooked. Corrugated feedhorns operating at 3 THz have been realised using ultra high precision machining techniques. To date it has not been possible to realise the corrugated horn structure via lithographic micromachining. This paper discusses the relative merits fabrication techniques, highlighting any or weakness that is relevant to terahertz waveguide fabrication.