"Membuilder": An Automated 3D Solid Model Construction Program For Microelectromechanical Structures

"Membuilder": An Automated 3D Solid Model Construction Program For Microelectromechanical Structures

Designers of microelectromechanical structures (MEMS) need to be able to construct, visualize and analyze robust 3D solid models within a single, convenient and integrated CAD design environment. We now report the completion , of our "MemBuilder" software which accornmodates this need with...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Osterberg, P.M., Senturia, S.D.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Actuators
Data visualization
Emulation
Etching
Hazards
Micromechanical devices
Performance analysis
Productivity
Solid modeling
Solid state circuits
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Designers of microelectromechanical structures (MEMS) need to be able to construct, visualize and analyze robust 3D solid models within a single, convenient and integrated CAD design environment. We now report the completion , of our "MemBuilder" software which accornmodates this need within the I-DEAS Master Series CAD environment. MemBuilder automates the process of 3D solid model construction of MEMS structures starting from user defined process data and 2D mask data. Meryffluilder successfully emulates MEMS structure construction in both surface-micromachined and wafer-bonded processes.
DOI:10.1109/SENSOR.1995.721734