A High-performance, Low Cost Capacitive Accelerometer Trimmed Using Nonvolatile Potentiometers (EEPOT's)

A High-performance, Low Cost Capacitive Accelerometer Trimmed Using Nonvolatile Potentiometers (EEPOT's)

The ability to calibrate an accelerometer after final assembly is an important improvement for high volume applications. We have developed a capacitive accelerometer which is trimmed using nonvolatile potentiometers. This trimming method as well as the short manufacturing steps of the sensor die red...

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Bibliographische Detailangaben
Hauptverfasser: Tschan, T., Urbanek, W., Mel Lim, Allen, H., Knutti, J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Accelerometers
Application specific integrated circuits
Costs
Etching
Manufacturing processes
Piezoresistance
Potentiometers
Silicon
Temperature dependence
Temperature sensors
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Beschreibung
Zusammenfassung:The ability to calibrate an accelerometer after final assembly is an important improvement for high volume applications. We have developed a capacitive accelerometer which is trimmed using nonvolatile potentiometers. This trimming method as well as the short manufacturing steps of the sensor die reduce the overall costs further in an increasingly price sensitive market.
DOI:10.1109/SENSOR.1995.717296