The Formation Of Electroplating Molds By Reactive Ion Etching

Polyimide, polymethylmethacrylate (PMMA) and polyester-based polymers were investigated as potential electroplating mold materials. They showed high tensile stress (/spl equiv/10/sup 8/ dyne/cm/sup 2/) after heat treatment at temperatures /spl ges/ 200/spl deg/C. Conventional reactive ion etching te...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Shih-Chia Chang, Putty, M.W., Hicks, D.B.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Aluminum Chromium Etching Gold Heat treatment Micromotors Microsensors Nickel Polymers Resists
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!