A Monolithic High-Flow Knudsen Pump Using Vertical Al2O3 Channels in SOI

This paper describes the analysis, design, and microfabrication of a Knudsen pump for high flow generation. The Knudsen pump generates gas streams from the cold end to the hot end using free-molecular flow without moving parts. The designed Knudsen pump has densely arrayed vertically oriented 2-μm w...

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Veröffentlicht in:	Journal of microelectromechanical systems 2015-10, Vol.24 (5), p.1606-1615
Hauptverfasser:	Seungdo An, Yutao Qin, Gianchandani, Yogesh B.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum oxide chromatography Dielectrics Etching gas Heat pumps Heat sinks Pumps Silicon Temperature distribution Thermal transpiration vacuum
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