Improved Variable EWMA Controller for General ARIMA Processes

The exponentially weighted moving average (EWMA) controller is a popular run-to-run control scheme in semiconductor manufacturing because of its effectiveness and simplicity. In this paper, we propose an improved variable EWMA controller design method. The optimal discount factor of the EWMA control...

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Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 2015-05, Vol.28 (2), p.129-136
Hauptverfasser:	Ma, Ming-Da, Li, Jia-Yi
Format:	Artikel
Sprache:	eng
Schlagworte:	Control systems EWMA Fabrication Mean square error methods Process control Run-to-run control semiconductor manufacturing Sensitivity Stability analysis variable discount factor
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