10-Gb/s Direct Modulation of Widely Tunable 1550-nm MEMS VCSEL
We demonstrate direct modulation of a widely tunable microelectromechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL). The wavelength tuning is realized with electrothermal actuation of a SiO x /SiN y -based MEMS distributed Bragg reflector (DBR). The DBR is deposited in a low-tem...
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| Veröffentlicht in: | IEEE journal of selected topics in quantum electronics 2015-11, Vol.21 (6), p.436-443 |
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| container_end_page | 443 |
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| container_issue | 6 |
| container_start_page | 436 |
| container_title | IEEE journal of selected topics in quantum electronics |
| container_volume | 21 |
| creator | Paul, Sujoy Gierl, Christian Cesar, Julijan Le, Quang Trung Malekizandi, Mohammadreza Kogel, Benjamin Neumeyr, Christian Ortsiefer, Markus Kuppers, Franko |
| description | We demonstrate direct modulation of a widely tunable microelectromechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL). The wavelength tuning is realized with electrothermal actuation of a SiO x /SiN y -based MEMS distributed Bragg reflector (DBR). The DBR is deposited in a low-temperature plasma-enhanced chemical vapor deposition chamber on a InP-based half-VCSEL by means of surface micromachining. More than 60 nm of mode-hop free continuous tuning with a center wavelength of 1554 nm is achieved. A maximum 3-dB small-signal modulation response (S 21 ) bandwidth of 7.05 GHz is reported. Quasi-error-free operation of a back-to-back link is demonstrated at 10 Gb/s for a record 47-nm tuning range, showing the compatibility of the MEMS tunable VCSEL as a cost-effective optical source in access networks and interconnects. |
| doi_str_mv | 10.1109/JSTQE.2015.2418218 |
| format | Article |
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The wavelength tuning is realized with electrothermal actuation of a SiO x /SiN y -based MEMS distributed Bragg reflector (DBR). The DBR is deposited in a low-temperature plasma-enhanced chemical vapor deposition chamber on a InP-based half-VCSEL by means of surface micromachining. More than 60 nm of mode-hop free continuous tuning with a center wavelength of 1554 nm is achieved. A maximum 3-dB small-signal modulation response (S 21 ) bandwidth of 7.05 GHz is reported. Quasi-error-free operation of a back-to-back link is demonstrated at 10 Gb/s for a record 47-nm tuning range, showing the compatibility of the MEMS tunable VCSEL as a cost-effective optical source in access networks and interconnects.</description><identifier>ISSN: 1077-260X</identifier><identifier>EISSN: 1558-4542</identifier><identifier>DOI: 10.1109/JSTQE.2015.2418218</identifier><identifier>CODEN: IJSQEN</identifier><language>eng</language><publisher>IEEE</publisher><subject>direct modulation ; Distributed Bragg reflectors ; electro-thermal tuning ; micro-electro-mechanical system (MEMS) ; Micromechanical devices ; Modulation ; optical communication ; Optical surface waves ; Stimulated emission ; surface micromachining ; Tunable ; Tuning ; Vertical cavity surface emitting lasers ; vertical-cavity surfaceemitting laser (VCSEL)</subject><ispartof>IEEE journal of selected topics in quantum electronics, 2015-11, Vol.21 (6), p.436-443</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c316t-16cb6525950059c0c17badb33a121ecd1166bdfd3c6a83c4d299230cb637eb7a3</citedby><cites>FETCH-LOGICAL-c316t-16cb6525950059c0c17badb33a121ecd1166bdfd3c6a83c4d299230cb637eb7a3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/7073611$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/7073611$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Paul, Sujoy</creatorcontrib><creatorcontrib>Gierl, Christian</creatorcontrib><creatorcontrib>Cesar, Julijan</creatorcontrib><creatorcontrib>Le, Quang Trung</creatorcontrib><creatorcontrib>Malekizandi, Mohammadreza</creatorcontrib><creatorcontrib>Kogel, Benjamin</creatorcontrib><creatorcontrib>Neumeyr, Christian</creatorcontrib><creatorcontrib>Ortsiefer, Markus</creatorcontrib><creatorcontrib>Kuppers, Franko</creatorcontrib><title>10-Gb/s Direct Modulation of Widely Tunable 1550-nm MEMS VCSEL</title><title>IEEE journal of selected topics in quantum electronics</title><addtitle>JSTQE</addtitle><description>We demonstrate direct modulation of a widely tunable microelectromechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL). The wavelength tuning is realized with electrothermal actuation of a SiO x /SiN y -based MEMS distributed Bragg reflector (DBR). The DBR is deposited in a low-temperature plasma-enhanced chemical vapor deposition chamber on a InP-based half-VCSEL by means of surface micromachining. More than 60 nm of mode-hop free continuous tuning with a center wavelength of 1554 nm is achieved. A maximum 3-dB small-signal modulation response (S 21 ) bandwidth of 7.05 GHz is reported. Quasi-error-free operation of a back-to-back link is demonstrated at 10 Gb/s for a record 47-nm tuning range, showing the compatibility of the MEMS tunable VCSEL as a cost-effective optical source in access networks and interconnects.</description><subject>direct modulation</subject><subject>Distributed Bragg reflectors</subject><subject>electro-thermal tuning</subject><subject>micro-electro-mechanical system (MEMS)</subject><subject>Micromechanical devices</subject><subject>Modulation</subject><subject>optical communication</subject><subject>Optical surface waves</subject><subject>Stimulated emission</subject><subject>surface micromachining</subject><subject>Tunable</subject><subject>Tuning</subject><subject>Vertical cavity surface emitting lasers</subject><subject>vertical-cavity surfaceemitting laser (VCSEL)</subject><issn>1077-260X</issn><issn>1558-4542</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2015</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kMtKw0AYRgdRsFZfQDfzApP-_0xmJtkIUtOqJIi0XnZhboFI2kiSLvr2pra4-r7NOYtDyC1ChAjp7GW1fssiDigjHmPCMTkjE5QyYbGM-fn4QWvGFXxdkqu-_waAJE5gQu4R2NLOevpYd8ENtGj9rjFD3W5pW9HP2odmT9e7rbFNoKMQ2HZDi6xY0Y_5KsuvyUVlmj7cnHZK3hfZev7E8tfl8_whZ06gGhgqZ5XkMpUAMnXgUFvjrRAGOQbnEZWyvvLCKZMIF3ueplzACAkdrDZiSvjR67q277tQlT9dvTHdvkQoDwXKvwLloUB5KjBCd0eoDiH8Axq0UIjiF5QXVHw</recordid><startdate>201511</startdate><enddate>201511</enddate><creator>Paul, Sujoy</creator><creator>Gierl, Christian</creator><creator>Cesar, Julijan</creator><creator>Le, Quang Trung</creator><creator>Malekizandi, Mohammadreza</creator><creator>Kogel, Benjamin</creator><creator>Neumeyr, Christian</creator><creator>Ortsiefer, Markus</creator><creator>Kuppers, Franko</creator><general>IEEE</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>201511</creationdate><title>10-Gb/s Direct Modulation of Widely Tunable 1550-nm MEMS VCSEL</title><author>Paul, Sujoy ; Gierl, Christian ; Cesar, Julijan ; Le, Quang Trung ; Malekizandi, Mohammadreza ; Kogel, Benjamin ; Neumeyr, Christian ; Ortsiefer, Markus ; Kuppers, Franko</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c316t-16cb6525950059c0c17badb33a121ecd1166bdfd3c6a83c4d299230cb637eb7a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2015</creationdate><topic>direct modulation</topic><topic>Distributed Bragg reflectors</topic><topic>electro-thermal tuning</topic><topic>micro-electro-mechanical system (MEMS)</topic><topic>Micromechanical devices</topic><topic>Modulation</topic><topic>optical communication</topic><topic>Optical surface waves</topic><topic>Stimulated emission</topic><topic>surface micromachining</topic><topic>Tunable</topic><topic>Tuning</topic><topic>Vertical cavity surface emitting lasers</topic><topic>vertical-cavity surfaceemitting laser (VCSEL)</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Paul, Sujoy</creatorcontrib><creatorcontrib>Gierl, Christian</creatorcontrib><creatorcontrib>Cesar, Julijan</creatorcontrib><creatorcontrib>Le, Quang Trung</creatorcontrib><creatorcontrib>Malekizandi, Mohammadreza</creatorcontrib><creatorcontrib>Kogel, Benjamin</creatorcontrib><creatorcontrib>Neumeyr, Christian</creatorcontrib><creatorcontrib>Ortsiefer, Markus</creatorcontrib><creatorcontrib>Kuppers, Franko</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><jtitle>IEEE journal of selected topics in quantum electronics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Paul, Sujoy</au><au>Gierl, Christian</au><au>Cesar, Julijan</au><au>Le, Quang Trung</au><au>Malekizandi, Mohammadreza</au><au>Kogel, Benjamin</au><au>Neumeyr, Christian</au><au>Ortsiefer, Markus</au><au>Kuppers, Franko</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>10-Gb/s Direct Modulation of Widely Tunable 1550-nm MEMS VCSEL</atitle><jtitle>IEEE journal of selected topics in quantum electronics</jtitle><stitle>JSTQE</stitle><date>2015-11</date><risdate>2015</risdate><volume>21</volume><issue>6</issue><spage>436</spage><epage>443</epage><pages>436-443</pages><issn>1077-260X</issn><eissn>1558-4542</eissn><coden>IJSQEN</coden><abstract>We demonstrate direct modulation of a widely tunable microelectromechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL). The wavelength tuning is realized with electrothermal actuation of a SiO x /SiN y -based MEMS distributed Bragg reflector (DBR). The DBR is deposited in a low-temperature plasma-enhanced chemical vapor deposition chamber on a InP-based half-VCSEL by means of surface micromachining. More than 60 nm of mode-hop free continuous tuning with a center wavelength of 1554 nm is achieved. A maximum 3-dB small-signal modulation response (S 21 ) bandwidth of 7.05 GHz is reported. Quasi-error-free operation of a back-to-back link is demonstrated at 10 Gb/s for a record 47-nm tuning range, showing the compatibility of the MEMS tunable VCSEL as a cost-effective optical source in access networks and interconnects.</abstract><pub>IEEE</pub><doi>10.1109/JSTQE.2015.2418218</doi><tpages>8</tpages></addata></record> |
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| ispartof | IEEE journal of selected topics in quantum electronics, 2015-11, Vol.21 (6), p.436-443 |
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| language | eng |
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| subjects | direct modulation Distributed Bragg reflectors electro-thermal tuning micro-electro-mechanical system (MEMS) Micromechanical devices Modulation optical communication Optical surface waves Stimulated emission surface micromachining Tunable Tuning Vertical cavity surface emitting lasers vertical-cavity surfaceemitting laser (VCSEL) |
| title | 10-Gb/s Direct Modulation of Widely Tunable 1550-nm MEMS VCSEL |
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