Knife-edge Thin Film Field Emission Cathodes On [110] Silicon Wafers

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Hauptverfasser:	Bo Lee, Elliott, T.S., Mazumdar, T.K., McIntyre, P.M., Pang, Y., Trost, H.-J.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Anisotropic magnetoresistance Capacitance Cathodes Cutoff frequency Dielectric substrates Etching Field emitter arrays Microwave amplifiers Semiconductor thin films Silicon
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creator	Bo Lee Elliott, T.S. Mazumdar, T.K. McIntyre, P.M. Pang, Y. Trost, H.-J.
description
doi_str_mv	10.1109/IVMC.1993.700271
format	Conference Proceeding
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ispartof	[Proceedings] IVMC '93 Sixth International Vacuum Microelectronics Conference, 1993, p.56-57
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language	eng
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source	IEEE Electronic Library (IEL) Conference Proceedings
subjects	Anisotropic magnetoresistance Capacitance Cathodes Cutoff frequency Dielectric substrates Etching Field emitter arrays Microwave amplifiers Semiconductor thin films Silicon
title	Knife-edge Thin Film Field Emission Cathodes On [110] Silicon Wafers
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