Highly Sensitive Coplanar Line Thin-Film Sensor Using SrTiO Film

A very sensitive thin-film sensor was developed using a coplanar line fabricated from SrTiO (Sr 33 Ti 16 O 51 ) film (0.5, 1, 2, 3, and 6 μm thick), amorphous CoNbZr film (5 μm thick), and Cu/Cr film (4 μm/0.2 μm). The deposited SrTiO film had high permittivity of around 31. This film enhanced the s...

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Veröffentlicht in:	IEEE transactions on magnetics 2014-11, Vol.50 (11), p.1-4
Hauptverfasser:	Uetake, Hiroaki, Kawakami, Toshiya, Yabukami, Shin, Ozawa, Tetsuya, Kobayashi, Nobukiyo, Arai, Ken Ichi
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous magnetic materials Gain Magnetic anisotropy Magnetic resonance Magnetism Magnetometers Permittivity Sensitivity
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