Highly Sensitive Coplanar Line Thin-Film Sensor Using SrTiO Film
A very sensitive thin-film sensor was developed using a coplanar line fabricated from SrTiO (Sr 33 Ti 16 O 51 ) film (0.5, 1, 2, 3, and 6 μm thick), amorphous CoNbZr film (5 μm thick), and Cu/Cr film (4 μm/0.2 μm). The deposited SrTiO film had high permittivity of around 31. This film enhanced the s...
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| Veröffentlicht in: | IEEE transactions on magnetics 2014-11, Vol.50 (11), p.1-4 |
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| container_title | IEEE transactions on magnetics |
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| creator | Uetake, Hiroaki Kawakami, Toshiya Yabukami, Shin Ozawa, Tetsuya Kobayashi, Nobukiyo Arai, Ken Ichi |
| description | A very sensitive thin-film sensor was developed using a coplanar line fabricated from SrTiO (Sr 33 Ti 16 O 51 ) film (0.5, 1, 2, 3, and 6 μm thick), amorphous CoNbZr film (5 μm thick), and Cu/Cr film (4 μm/0.2 μm). The deposited SrTiO film had high permittivity of around 31. This film enhanced the sensitivity of the magnetic field sensor, a phase change of more than 100°/Oe and gain of over -40 dB being achieved simultaneously. The sensor with SrTiO film enhanced the sensitivity about 1.6 times greater than that with SiO 2 film because of the high permittivity of the SrTiO film. The sensitivity of the sensor increased with increasing thickness of the SrTiO film, a thickness of around 3 μm being sufficient for enhancement of the sensitivity. |
| doi_str_mv | 10.1109/TMAG.2014.2331676 |
| format | Article |
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The deposited SrTiO film had high permittivity of around 31. This film enhanced the sensitivity of the magnetic field sensor, a phase change of more than 100°/Oe and gain of over -40 dB being achieved simultaneously. The sensor with SrTiO film enhanced the sensitivity about 1.6 times greater than that with SiO 2 film because of the high permittivity of the SrTiO film. The sensitivity of the sensor increased with increasing thickness of the SrTiO film, a thickness of around 3 μm being sufficient for enhancement of the sensitivity.</description><identifier>ISSN: 0018-9464</identifier><identifier>EISSN: 1941-0069</identifier><identifier>DOI: 10.1109/TMAG.2014.2331676</identifier><identifier>CODEN: IEMGAQ</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Amorphous magnetic materials ; Gain ; Magnetic anisotropy ; Magnetic resonance ; Magnetism ; Magnetometers ; Permittivity ; Sensitivity</subject><ispartof>IEEE transactions on magnetics, 2014-11, Vol.50 (11), p.1-4</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Nov 2014</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c359t-c6fc2d7813c98b8da65b325d2b24f8defbdc079eeba0fd862a521d1b37d27dc83</citedby><cites>FETCH-LOGICAL-c359t-c6fc2d7813c98b8da65b325d2b24f8defbdc079eeba0fd862a521d1b37d27dc83</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6971665$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6971665$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Uetake, Hiroaki</creatorcontrib><creatorcontrib>Kawakami, Toshiya</creatorcontrib><creatorcontrib>Yabukami, Shin</creatorcontrib><creatorcontrib>Ozawa, Tetsuya</creatorcontrib><creatorcontrib>Kobayashi, Nobukiyo</creatorcontrib><creatorcontrib>Arai, Ken Ichi</creatorcontrib><title>Highly Sensitive Coplanar Line Thin-Film Sensor Using SrTiO Film</title><title>IEEE transactions on magnetics</title><addtitle>TMAG</addtitle><description>A very sensitive thin-film sensor was developed using a coplanar line fabricated from SrTiO (Sr 33 Ti 16 O 51 ) film (0.5, 1, 2, 3, and 6 μm thick), amorphous CoNbZr film (5 μm thick), and Cu/Cr film (4 μm/0.2 μm). The deposited SrTiO film had high permittivity of around 31. This film enhanced the sensitivity of the magnetic field sensor, a phase change of more than 100°/Oe and gain of over -40 dB being achieved simultaneously. The sensor with SrTiO film enhanced the sensitivity about 1.6 times greater than that with SiO 2 film because of the high permittivity of the SrTiO film. The sensitivity of the sensor increased with increasing thickness of the SrTiO film, a thickness of around 3 μm being sufficient for enhancement of the sensitivity.</description><subject>Amorphous magnetic materials</subject><subject>Gain</subject><subject>Magnetic anisotropy</subject><subject>Magnetic resonance</subject><subject>Magnetism</subject><subject>Magnetometers</subject><subject>Permittivity</subject><subject>Sensitivity</subject><issn>0018-9464</issn><issn>1941-0069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kNFqwjAUhsPYYM7tAcZuAruuy0nSNLmbyNSBwwvrdUibVCO1dYkOfPu1U3Z1-A_ffw58CD0DGQEQ9ZZ_jWcjSoCPKGMgMnGDBqA4JIQIdYsGhIBMFBf8Hj3EuOsiT4EM0Pvcb7b1Ga9cE_3R_zg8aQ-1aUzAC984nG99k0x9vf8j2oDX0TcbvAq5X-J-_4juKlNH93SdQ7SefuSTebJYzj4n40VSslQdk1JUJbWZBFYqWUhrRFowmlpaUF5J66rCliRTzhWGVFYKalIKFgqWWZrZUrIher3cPYT2--TiUe_aU2i6lxoEIyA459BRcKHK0MYYXKUPwe9NOGsguhele1G6F6WvorrOy6XjnXP_vFAZCJGyXxX2Y3k</recordid><startdate>201411</startdate><enddate>201411</enddate><creator>Uetake, Hiroaki</creator><creator>Kawakami, Toshiya</creator><creator>Yabukami, Shin</creator><creator>Ozawa, Tetsuya</creator><creator>Kobayashi, Nobukiyo</creator><creator>Arai, Ken Ichi</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>201411</creationdate><title>Highly Sensitive Coplanar Line Thin-Film Sensor Using SrTiO Film</title><author>Uetake, Hiroaki ; Kawakami, Toshiya ; Yabukami, Shin ; Ozawa, Tetsuya ; Kobayashi, Nobukiyo ; Arai, Ken Ichi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c359t-c6fc2d7813c98b8da65b325d2b24f8defbdc079eeba0fd862a521d1b37d27dc83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Amorphous magnetic materials</topic><topic>Gain</topic><topic>Magnetic anisotropy</topic><topic>Magnetic resonance</topic><topic>Magnetism</topic><topic>Magnetometers</topic><topic>Permittivity</topic><topic>Sensitivity</topic><toplevel>online_resources</toplevel><creatorcontrib>Uetake, Hiroaki</creatorcontrib><creatorcontrib>Kawakami, Toshiya</creatorcontrib><creatorcontrib>Yabukami, Shin</creatorcontrib><creatorcontrib>Ozawa, Tetsuya</creatorcontrib><creatorcontrib>Kobayashi, Nobukiyo</creatorcontrib><creatorcontrib>Arai, Ken Ichi</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE transactions on magnetics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Uetake, Hiroaki</au><au>Kawakami, Toshiya</au><au>Yabukami, Shin</au><au>Ozawa, Tetsuya</au><au>Kobayashi, Nobukiyo</au><au>Arai, Ken Ichi</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Highly Sensitive Coplanar Line Thin-Film Sensor Using SrTiO Film</atitle><jtitle>IEEE transactions on magnetics</jtitle><stitle>TMAG</stitle><date>2014-11</date><risdate>2014</risdate><volume>50</volume><issue>11</issue><spage>1</spage><epage>4</epage><pages>1-4</pages><issn>0018-9464</issn><eissn>1941-0069</eissn><coden>IEMGAQ</coden><abstract>A very sensitive thin-film sensor was developed using a coplanar line fabricated from SrTiO (Sr 33 Ti 16 O 51 ) film (0.5, 1, 2, 3, and 6 μm thick), amorphous CoNbZr film (5 μm thick), and Cu/Cr film (4 μm/0.2 μm). The deposited SrTiO film had high permittivity of around 31. This film enhanced the sensitivity of the magnetic field sensor, a phase change of more than 100°/Oe and gain of over -40 dB being achieved simultaneously. The sensor with SrTiO film enhanced the sensitivity about 1.6 times greater than that with SiO 2 film because of the high permittivity of the SrTiO film. The sensitivity of the sensor increased with increasing thickness of the SrTiO film, a thickness of around 3 μm being sufficient for enhancement of the sensitivity.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TMAG.2014.2331676</doi><tpages>4</tpages></addata></record> |
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| subjects | Amorphous magnetic materials Gain Magnetic anisotropy Magnetic resonance Magnetism Magnetometers Permittivity Sensitivity |
| title | Highly Sensitive Coplanar Line Thin-Film Sensor Using SrTiO Film |
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