MEMS designed for tunable capacitors

MEMS designed for tunable capacitors

A new tunable capacitor based on a standard microelectromechanical systems (MEMS) technology has been demonstrated. Its unique feature was the use of thermal actuators as indirect drives to change air gap from 2 to 0.2 /spl mu/m for high-Q MM-wave capacitors. Such a drive scheme achieved a sub-/spl...

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Bibliographische Detailangaben
Hauptverfasser: Wu, H.D., Harsh, K.F., Irwin, R.S., Wenge Zhang, Mickelson, A.R., Lee, Y.C., Dobsa, J.B.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Actuators
Assembly
Capacitance measurement
Capacitors
Ceramics
Electrostatics
Micromechanical devices
Silicon
Thermal expansion
Voltage
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Beschreibung
Zusammenfassung:A new tunable capacitor based on a standard microelectromechanical systems (MEMS) technology has been demonstrated. Its unique feature was the use of thermal actuators as indirect drives to change air gap from 2 to 0.2 /spl mu/m for high-Q MM-wave capacitors. Such a drive scheme achieved a sub-/spl mu/m controllability. The insertion loss of a polysilicon MEMS capacitor was measured to be -4dB at 40 GHz. Such a loss would have been better than -1 dB if the polysilicon were coated with metal.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.1998.689339