Development of released micromachined structures for millimeterwave device applications: preliminary results

The exploding interest in miniaturized subsystems for mobile and satellite communications applications has revealed a dire need for higher levels of integration, performance, and cost-effectiveness from millimeter-wave components. Monolithic microwave integrated circuit (MMIC) technology has enabled...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yarbrough, A.D., Cole, R.C., Robertson, R.E.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Analog integrated circuits Integrated circuit technology Micromechanical devices Microwave integrated circuits Millimeter wave integrated circuits Millimeter wave technology MMICs Monolithic integrated circuits Satellite communication Space technology
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