Fabrication of adjustable cylindrical mirror segments for the SMART-X telescope

The adaptive optics system for the SMARTX telescope consists of piezoelectric PbZr 0.52 Ti 0.48 O 3 (PZT) thin films deposited on the backside of the mirror. To achieve sufficient strain response from the piezoelectric films, the substrates chosen are thin, flexible glass pieces that can be slumped...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2014-08, Vol.61 (8), p.1386-1392
Hauptverfasser:	Wilke, Rudeger, Johnson-Wilke, Raegan, Cotroneo, Vincenzo, McMuldroch, Stuart, Reid, Paul, Schwartz, Daniel, Trolier-McKinstry, Susan
Format:	Artikel
Sprache:	eng
Schlagworte:	Deposition Electrodes Glass Influence functions Lead zirconate titanates Mirrors Piezoelectricity Segments Sputtering Strain Substrates Telescopes Thin films
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