A three-dimensional imaging system for surface profilometry of moving objects

Non-contact optical imaging system design and the corresponding surface profilometry algorithm are critical components in various metrology applications, such as surface inspection of semiconductor components on the production line. For such challenging industrial applications, the most important co...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Fuqin Deng, Jianyang Liu, Jiangwen Deng, Fung, Kenneth S. M., Lam, Edmund Y.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Cameras Image reconstruction industrial inspection Inspection Optical imaging profilometry surface measurement Surface reconstruction Surface treatment three-dimensional image acquisition
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