Derivation of accurate tensor data of materials in SAW devices by solving a parameter identification problem using an enhanced eigenvalue analysis of an infinite array model

Accurate simulations of SAW elements require accurate material parameters. However, literature values, usually based on measurements of thick crystals, mostly don't reflect the properties of thin film layers used within SAW devices with the necessary precision. In this work, a parameter identif...

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Hauptverfasser: Grunauer, Gerold, Mayer, Markus, Knapp, Matthias, Jaeger, Philipp, Ebner, Thomas, Wagner, Karl, Pesch, Hans Josef
Format: Tagungsbericht
Sprache:eng
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