Using LV process to design high voltage DDDMOSFET and LDMOSFET with 3-D profile structure

In this work, layout skills using three dimensional (3D) fish bone, slot, and island patterns to enhance the breakdown voltage of PW/NW junction of lateral MOSFETs is developed. Novel lateral double diffused MOSFETs (LDMOSFET) and Double Diffused Drain MOSFETs (DDDMOSFET) without any high voltage (H...

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Bibliographische Detailangaben
Hauptverfasser: Chien-Hao Huang, Tsung-Yi Huang, Ching-Yao Yang, Huang-Ping Chu, Kuo-Hsuan Lo, Chung-Yu Hung, Kuo-Cheng Chang, Hung-Der Su, Chih-Fang Huang, Jeng Gong
Format: Tagungsbericht
Sprache:eng
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