An analytical model for the optimization of toggle-based RF-MEMS varactors tuning range

This paper presents an analysis of the actuation mechanism of the push-pull toggle varactor design concept for radio frequency applications, based on RF-MEMS technology. The focus of this analysis is to maximize the tuning range. In particular the influence of the dimension and the distance of the fixed electrode on the tuning range has been investigated. The results of the analytical formulation have been then compared with multi-physical simulations in order to assess the accuracy of the prediction showing promising results.