Advanced methods for calculating quadrature errors of MEMS gyroscopes

Advanced methods for calculating quadrature errors of MEMS gyroscopes

MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between d...

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Hauptverfasser: Kehrberg, Steven, Dorwarth, Markus, Heitz, Markus, Geckeler, Carsten, Mehner, Jan
Format: Tagungsbericht
Sprache:eng
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Correlation
Couplings
Force
Gyroscopes
Micromechanical devices
Oscillators
Sensors
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creator Kehrberg, Steven
Dorwarth, Markus
Heitz, Markus
Geckeler, Carsten
Mehner, Jan
description MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between drive and detection mode by only adding a coupling term in the stiffness matrix. The new method is adding an inertial coupling term to the system mass matrix. This leads to a large decrease of the calculation time in combination with a higher accuracy.
doi_str_mv 10.1109/ICSENS.2013.6688463
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fullrecord <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_6688463</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>6688463</ieee_id><sourcerecordid>6688463</sourcerecordid><originalsourceid>FETCH-LOGICAL-i90t-e184829830831c5279a7926ef3fba51cefcb32fe8df360dd57980a3488b1225e3</originalsourceid><addsrcrecordid>eNotz8FOAjEUQNFqNBHQL2DTHxhs35vptEsyGZUEdDEs3JHSvuIYoNgOJvy9C1nd3UkuY1MpZlIK87xouva9m4GQOFNK61LhDRvLUtVYqhI-b9kIpNKFATB3bCQNikKgqR7YOOdvIUBUoEesnftfe3Tk-YGGr-gzDzFxZ_fuvLdDf9zxn7P1yQ7nRJxSiinzGPiqXXV8d0kxu3ii_Mjug91nerp2wtYv7bp5K5Yfr4tmvix6I4aCpC41GI1Co3QV1MbWBhQFDFtbSUfBbRECaR9QCe-r2mhhsdR6KwEqwgmb_rM9EW1OqT_YdNlc7_EPhv9NBQ</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Advanced methods for calculating quadrature errors of MEMS gyroscopes</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Kehrberg, Steven ; Dorwarth, Markus ; Heitz, Markus ; Geckeler, Carsten ; Mehner, Jan</creator><creatorcontrib>Kehrberg, Steven ; Dorwarth, Markus ; Heitz, Markus ; Geckeler, Carsten ; Mehner, Jan</creatorcontrib><description>MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between drive and detection mode by only adding a coupling term in the stiffness matrix. The new method is adding an inertial coupling term to the system mass matrix. This leads to a large decrease of the calculation time in combination with a higher accuracy.</description><identifier>ISSN: 1930-0395</identifier><identifier>EISSN: 2168-9229</identifier><identifier>EISBN: 146734642X</identifier><identifier>EISBN: 9781467346429</identifier><identifier>DOI: 10.1109/ICSENS.2013.6688463</identifier><language>eng</language><publisher>IEEE</publisher><subject>Correlation ; Couplings ; Force ; Gyroscopes ; Micromechanical devices ; Oscillators ; Sensors</subject><ispartof>2013 IEEE SENSORS, 2013, p.1-4</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6688463$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2051,27904,54899</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6688463$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Kehrberg, Steven</creatorcontrib><creatorcontrib>Dorwarth, Markus</creatorcontrib><creatorcontrib>Heitz, Markus</creatorcontrib><creatorcontrib>Geckeler, Carsten</creatorcontrib><creatorcontrib>Mehner, Jan</creatorcontrib><title>Advanced methods for calculating quadrature errors of MEMS gyroscopes</title><title>2013 IEEE SENSORS</title><addtitle>ICSENS</addtitle><description>MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between drive and detection mode by only adding a coupling term in the stiffness matrix. The new method is adding an inertial coupling term to the system mass matrix. This leads to a large decrease of the calculation time in combination with a higher accuracy.</description><subject>Correlation</subject><subject>Couplings</subject><subject>Force</subject><subject>Gyroscopes</subject><subject>Micromechanical devices</subject><subject>Oscillators</subject><subject>Sensors</subject><issn>1930-0395</issn><issn>2168-9229</issn><isbn>146734642X</isbn><isbn>9781467346429</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2013</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotz8FOAjEUQNFqNBHQL2DTHxhs35vptEsyGZUEdDEs3JHSvuIYoNgOJvy9C1nd3UkuY1MpZlIK87xouva9m4GQOFNK61LhDRvLUtVYqhI-b9kIpNKFATB3bCQNikKgqR7YOOdvIUBUoEesnftfe3Tk-YGGr-gzDzFxZ_fuvLdDf9zxn7P1yQ7nRJxSiinzGPiqXXV8d0kxu3ii_Mjug91nerp2wtYv7bp5K5Yfr4tmvix6I4aCpC41GI1Co3QV1MbWBhQFDFtbSUfBbRECaR9QCe-r2mhhsdR6KwEqwgmb_rM9EW1OqT_YdNlc7_EPhv9NBQ</recordid><startdate>201311</startdate><enddate>201311</enddate><creator>Kehrberg, Steven</creator><creator>Dorwarth, Markus</creator><creator>Heitz, Markus</creator><creator>Geckeler, Carsten</creator><creator>Mehner, Jan</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>201311</creationdate><title>Advanced methods for calculating quadrature errors of MEMS gyroscopes</title><author>Kehrberg, Steven ; Dorwarth, Markus ; Heitz, Markus ; Geckeler, Carsten ; Mehner, Jan</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-e184829830831c5279a7926ef3fba51cefcb32fe8df360dd57980a3488b1225e3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Correlation</topic><topic>Couplings</topic><topic>Force</topic><topic>Gyroscopes</topic><topic>Micromechanical devices</topic><topic>Oscillators</topic><topic>Sensors</topic><toplevel>online_resources</toplevel><creatorcontrib>Kehrberg, Steven</creatorcontrib><creatorcontrib>Dorwarth, Markus</creatorcontrib><creatorcontrib>Heitz, Markus</creatorcontrib><creatorcontrib>Geckeler, Carsten</creatorcontrib><creatorcontrib>Mehner, Jan</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kehrberg, Steven</au><au>Dorwarth, Markus</au><au>Heitz, Markus</au><au>Geckeler, Carsten</au><au>Mehner, Jan</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Advanced methods for calculating quadrature errors of MEMS gyroscopes</atitle><btitle>2013 IEEE SENSORS</btitle><stitle>ICSENS</stitle><date>2013-11</date><risdate>2013</risdate><spage>1</spage><epage>4</epage><pages>1-4</pages><issn>1930-0395</issn><eissn>2168-9229</eissn><eisbn>146734642X</eisbn><eisbn>9781467346429</eisbn><abstract>MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between drive and detection mode by only adding a coupling term in the stiffness matrix. The new method is adding an inertial coupling term to the system mass matrix. This leads to a large decrease of the calculation time in combination with a higher accuracy.</abstract><pub>IEEE</pub><doi>10.1109/ICSENS.2013.6688463</doi><tpages>4</tpages></addata></record>
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subjects Correlation
Couplings
Force
Gyroscopes
Micromechanical devices
Oscillators
Sensors
title Advanced methods for calculating quadrature errors of MEMS gyroscopes
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-22T03%3A07%3A25IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Advanced%20methods%20for%20calculating%20quadrature%20errors%20of%20MEMS%20gyroscopes&rft.btitle=2013%20IEEE%20SENSORS&rft.au=Kehrberg,%20Steven&rft.date=2013-11&rft.spage=1&rft.epage=4&rft.pages=1-4&rft.issn=1930-0395&rft.eissn=2168-9229&rft_id=info:doi/10.1109/ICSENS.2013.6688463&rft_dat=%3Cieee_6IE%3E6688463%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=146734642X&rft.eisbn_list=9781467346429&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=6688463&rfr_iscdi=true