MEMS capacitive sensor using FGMOS
In this paper, a capacitance structure configured with two plates to be used as a MEMS-sensor is presented. This capacitor was designed primarily for being used in combination with a floating-gate MOS transistor (FGMOS) as the transducer device of an accelerometer. One of the plates of this capacita...
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| creator | Abarca-Jimenez, G. S. Reyes-Barranca, M. A. Mendoza-Acevedo, S. |
| description | In this paper, a capacitance structure configured with two plates to be used as a MEMS-sensor is presented. This capacitor was designed primarily for being used in combination with a floating-gate MOS transistor (FGMOS) as the transducer device of an accelerometer. One of the plates of this capacitance structure is fixed and the other plate will move when a force is applied, causing a variable capacitance, this is achieved by a lateral comb configuration. This variable capacitance depends either on the mechanical properties of the material used in the structure, the undesired displacement caused by gravity and pull-in effect. Furthermore, the proposed design can be fabricated using standard CMOS technologies followed by a sacrificial layer etching needed for the structure release. |
| doi_str_mv | 10.1109/ICEEE.2013.6676083 |
| format | Conference Proceeding |
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Furthermore, the proposed design can be fabricated using standard CMOS technologies followed by a sacrificial layer etching needed for the structure release.</description><subject>Capacitance</subject><subject>Capacitors</subject><subject>Cities and towns</subject><subject>Floating-gate MOS</subject><subject>Force</subject><subject>mechanical properties</subject><subject>MEMS</subject><subject>Metals</subject><subject>Micromechanical devices</subject><subject>Sensors</subject><isbn>9781479914616</isbn><isbn>1479914614</isbn><isbn>9781479914609</isbn><isbn>1479914606</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2013</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotz71OwzAUQGEzIIFKXgCWiD3h3vjn2iOK0lKpUYewV7Z7XbmCUsUFibdnoNPZPukI8YjQIoJ7WffDMLQdoGyNIQNW3ojKkUVFzqEyaO5EVcoRAJBIa4n34nkcxqmO_uxjvuQfrgufytdcf5d8OtTL1bidHsRt8h-Fq2sXYloO7_1bs9mu1v3rpskOLo3eW-z2MSgIJqBXNtrE7ElZYAhJdhSiSeyMDjE5kuCSlo6AEkTGJBfi6V_NzLw7z_nTz7-764f8A4T8PJU</recordid><startdate>201309</startdate><enddate>201309</enddate><creator>Abarca-Jimenez, G. 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A. ; Mendoza-Acevedo, S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-5d812dcb40b6b1a48c8feea7480e0bf327bc6fe965bcf97309f539707f0ce1f3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Capacitance</topic><topic>Capacitors</topic><topic>Cities and towns</topic><topic>Floating-gate MOS</topic><topic>Force</topic><topic>mechanical properties</topic><topic>MEMS</topic><topic>Metals</topic><topic>Micromechanical devices</topic><topic>Sensors</topic><toplevel>online_resources</toplevel><creatorcontrib>Abarca-Jimenez, G. S.</creatorcontrib><creatorcontrib>Reyes-Barranca, M. A.</creatorcontrib><creatorcontrib>Mendoza-Acevedo, S.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Abarca-Jimenez, G. S.</au><au>Reyes-Barranca, M. A.</au><au>Mendoza-Acevedo, S.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>MEMS capacitive sensor using FGMOS</atitle><btitle>2013 10th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)</btitle><stitle>ICEEE</stitle><date>2013-09</date><risdate>2013</risdate><spage>421</spage><epage>426</epage><pages>421-426</pages><eisbn>9781479914616</eisbn><eisbn>1479914614</eisbn><eisbn>9781479914609</eisbn><eisbn>1479914606</eisbn><abstract>In this paper, a capacitance structure configured with two plates to be used as a MEMS-sensor is presented. This capacitor was designed primarily for being used in combination with a floating-gate MOS transistor (FGMOS) as the transducer device of an accelerometer. One of the plates of this capacitance structure is fixed and the other plate will move when a force is applied, causing a variable capacitance, this is achieved by a lateral comb configuration. This variable capacitance depends either on the mechanical properties of the material used in the structure, the undesired displacement caused by gravity and pull-in effect. Furthermore, the proposed design can be fabricated using standard CMOS technologies followed by a sacrificial layer etching needed for the structure release.</abstract><pub>IEEE</pub><doi>10.1109/ICEEE.2013.6676083</doi><tpages>6</tpages></addata></record> |
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| subjects | Capacitance Capacitors Cities and towns Floating-gate MOS Force mechanical properties MEMS Metals Micromechanical devices Sensors |
| title | MEMS capacitive sensor using FGMOS |
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