Failure analysis of TaN thin film resistors for microwave circuits

The failure manifestations of TaN thin film resistors for microwave circuits are that resistances become larger or even breaker failures occur. In order to investigate the failure mechanism of TaN thin film resistors, the resistance changing analysis under varied voltages and morphologies are studie...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Qiantao Cao, Zhiming Song, Fei Wang, Bin Wang, Zhenguo Song, Yinglu Hu
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Ceramics Gold Resistance Resistors Substrates
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