Breakthrough UV-LIGA microfabrication of sub-mm and THz circuits

Breakthrough UV-LIGA microfabrication of sub-mm and THz circuits

The U.S. Naval Research Laboratory has been developing a novel UV-LIGA process to create amplifier circuits from 100 GHz through the THz. A 670 GHz EIK ladder test piece has been successfully fabricated with a 0.004 inch diameter beam tunnel, and demonstrates sub-micron fabrication accuracies. The t...

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Bibliographische Detailangaben
Hauptverfasser: Joye, Colin D., Cook, Alan M., Calame, Jeffrey P., Abe, David K., Levush, Baruch
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Copper
Fabrication
Klystrons
Polymers
Wideband
Wires
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Beschreibung
Zusammenfassung:The U.S. Naval Research Laboratory has been developing a novel UV-LIGA process to create amplifier circuits from 100 GHz through the THz. A 670 GHz EIK ladder test piece has been successfully fabricated with a 0.004 inch diameter beam tunnel, and demonstrates sub-micron fabrication accuracies. The technique is being extended to showcase capabilities at 850 GHz, and 1.03, 1.35 and 1.50 THz.
DOI:10.1109/IVEC.2013.6571006