Superhydrophobic surface obtained using pyramidal PTFE film fabricated on RIE etched silicon

We have developed a surface texturing process using a polytetrafluoroethylene coating with a pyramidal structure for obtaining superhydrophobic surfaces. In order to investigate the hydrophobic properties of the surface, we measured the contact angle and roughness values. The calculated roughness fa...

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Bibliographische Detailangaben

Hauptverfasser:	Chul-Heum Baek, Yao Litao, Sung-Bo Seo, Hwa-Min Kim, Dae-Seung Pyo, Pyo-Hwan Hong, Jung-Hwa Oh, Dae-Young Kong, Chan-Seob Cho, Jong-Hyun Lee, In-Yong Eom, Bonghwan Kim
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	PTFE RIE Rough surfaces Silicon superhydrophobic surface Surface contamination Surface morphology Surface roughness Surface treatment
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