Fabrication of metallic microchannel mold using X-ray LIGA for microfluidic applications

Metallic microchannel mold for microfliudic applications is demonstrated based on X-ray LIGA technology. High aspect ratio microchannel made of SU-8 photoresist was constructed on a stainless substrate to create a mold template using X-ray lithography generated by synchrotron light source. Following...

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Bibliographische Detailangaben

Hauptverfasser:	Phatthanakun, R., Yunphuttha, C., Pantong, C., Sriphung, C., Chomnawang, N., Viravathana, P.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Microchannel Microfluidic Microfluidics Micromold Nickel PDMS replication Resists Steel Substrates Surface treatment Synchrotron light X-ray LIGA
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