Laser induced crystallization: a method for preparing silicon thin film solar cells

The preparation of coarse grained silicon thin films on glass suited for solar cells is investigated. The authors start from amorphous hydrogenated silicon thin films several 100 nm thick deposited on glass. Different laser crystallization processes are discussed. By an Ar/sup +/ laser scan, the amo...

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Bibliographische Detailangaben
Hauptverfasser: Andra, G., Bergmann, J., Falk, F., Ose, E.
Format: Tagungsbericht
Sprache:eng
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