Efficient Spatial Pattern Analysis for Variation Decomposition Via Robust Sparse Regression

In this paper, we propose a new technique to achieve accurate decomposition of process variation by efficiently performing spatial pattern analysis. We demonstrate that the spatially correlated systematic variation can be accurately represented by the linear combination of a small number of template...

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Veröffentlicht in:	IEEE transactions on computer-aided design of integrated circuits and systems 2013-07, Vol.32 (7), p.1072-1085
Hauptverfasser:	Wangyang Zhang, Balakrishnan, K., Xin Li, Boning, D. S., Saxena, S., Strojwas, A., Rutenbar, R. A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Dictionaries Discrete cosine transforms Integrated circuit Integrated circuit modeling Pattern analysis process variation Robustness Semiconductor device modeling spatial variation Systematics variation decomposition
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