Tuning the bandwidth and center frequency of micromechanical acoustic resonators
As the radio frequency (RF) spectrum has become more crowded, the need for adaptable RF components, especially filters, has grown. Recently, aluminum nitride (AlN) microresonator filters have been reported. These filters/resonators are small (1000) desired for steep filter roll-off, can achieve many...
Gespeichert in:
| Hauptverfasser: | , , , , , |
|---|---|
| Format: | Tagungsbericht |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 1 |
|---|---|
| container_issue | |
| container_start_page | 1 |
| container_title | |
| container_volume | |
| creator | Olsson, Roy H. Bongsang Kim Nguyen, Janet Clews, Peggy Pluym, Tammy Wojciechowski, Kenneth E. |
| description | As the radio frequency (RF) spectrum has become more crowded, the need for adaptable RF components, especially filters, has grown. Recently, aluminum nitride (AlN) microresonator filters have been reported. These filters/resonators are small (1000) desired for steep filter roll-off, can achieve many filters covering a very wide frequency span (kHz to GHz) on a single chip and can be monolithically integrated with CMOS transistors for reconfiguring the filter array. Using AlN microresonator on CMOS technology, miniature, adaptable RF filters based on banks of switched filters have recently been reported. |
| doi_str_mv | 10.1109/USNC-URSI-NRSM.2013.6525081 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_6525081</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>6525081</ieee_id><sourcerecordid>6525081</sourcerecordid><originalsourceid>FETCH-ieee_primary_65250813</originalsourceid><addsrcrecordid>eNp9jj0LwjAURSMi-NVf4PLAuTWx2rSzKDooYnWWGF9txCaapIj_Xgddne49XDhcQoaMRozRbHTIN7PwsMtX4WaXr6MxZXGUTMdTmrIGCTKesknC4wnnPG2S7g8S2iaBc1dK6ceSZCztkO2-1kpfwJcIJ6HPT3X2JXwKSNQeLRQWHzVq-QJTQKWkNRXKUmglxQ2ENLXzSoJFZ7Twxro-aRXi5jD4Zo8MFvP9bBkqRDzeraqEfR2_Z-P_6xtKlUVB</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Tuning the bandwidth and center frequency of micromechanical acoustic resonators</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Olsson, Roy H. ; Bongsang Kim ; Nguyen, Janet ; Clews, Peggy ; Pluym, Tammy ; Wojciechowski, Kenneth E.</creator><creatorcontrib>Olsson, Roy H. ; Bongsang Kim ; Nguyen, Janet ; Clews, Peggy ; Pluym, Tammy ; Wojciechowski, Kenneth E.</creatorcontrib><description>As the radio frequency (RF) spectrum has become more crowded, the need for adaptable RF components, especially filters, has grown. Recently, aluminum nitride (AlN) microresonator filters have been reported. These filters/resonators are small (<1mm 3 ), have the high quality factors (>1000) desired for steep filter roll-off, can achieve many filters covering a very wide frequency span (kHz to GHz) on a single chip and can be monolithically integrated with CMOS transistors for reconfiguring the filter array. Using AlN microresonator on CMOS technology, miniature, adaptable RF filters based on banks of switched filters have recently been reported.</description><identifier>ISBN: 1467347760</identifier><identifier>ISBN: 9781467347761</identifier><identifier>EISBN: 9781467347778</identifier><identifier>EISBN: 9781467347785</identifier><identifier>EISBN: 1467347787</identifier><identifier>EISBN: 1467347779</identifier><identifier>DOI: 10.1109/USNC-URSI-NRSM.2013.6525081</identifier><language>eng</language><publisher>IEEE</publisher><subject>CMOS integrated circuits ; Filter banks ; III-V semiconductor materials ; Microcavities ; Radio frequency ; Resonant frequency ; Resonator filters</subject><ispartof>2013 US National Committee of URSI National Radio Science Meeting (USNC-URSI NRSM), 2013, p.1-1</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6525081$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,27902,54895</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6525081$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Olsson, Roy H.</creatorcontrib><creatorcontrib>Bongsang Kim</creatorcontrib><creatorcontrib>Nguyen, Janet</creatorcontrib><creatorcontrib>Clews, Peggy</creatorcontrib><creatorcontrib>Pluym, Tammy</creatorcontrib><creatorcontrib>Wojciechowski, Kenneth E.</creatorcontrib><title>Tuning the bandwidth and center frequency of micromechanical acoustic resonators</title><title>2013 US National Committee of URSI National Radio Science Meeting (USNC-URSI NRSM)</title><addtitle>USNC-URSI-NRSM</addtitle><description>As the radio frequency (RF) spectrum has become more crowded, the need for adaptable RF components, especially filters, has grown. Recently, aluminum nitride (AlN) microresonator filters have been reported. These filters/resonators are small (<1mm 3 ), have the high quality factors (>1000) desired for steep filter roll-off, can achieve many filters covering a very wide frequency span (kHz to GHz) on a single chip and can be monolithically integrated with CMOS transistors for reconfiguring the filter array. Using AlN microresonator on CMOS technology, miniature, adaptable RF filters based on banks of switched filters have recently been reported.</description><subject>CMOS integrated circuits</subject><subject>Filter banks</subject><subject>III-V semiconductor materials</subject><subject>Microcavities</subject><subject>Radio frequency</subject><subject>Resonant frequency</subject><subject>Resonator filters</subject><isbn>1467347760</isbn><isbn>9781467347761</isbn><isbn>9781467347778</isbn><isbn>9781467347785</isbn><isbn>1467347787</isbn><isbn>1467347779</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2013</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNp9jj0LwjAURSMi-NVf4PLAuTWx2rSzKDooYnWWGF9txCaapIj_Xgddne49XDhcQoaMRozRbHTIN7PwsMtX4WaXr6MxZXGUTMdTmrIGCTKesknC4wnnPG2S7g8S2iaBc1dK6ceSZCztkO2-1kpfwJcIJ6HPT3X2JXwKSNQeLRQWHzVq-QJTQKWkNRXKUmglxQ2ENLXzSoJFZ7Twxro-aRXi5jD4Zo8MFvP9bBkqRDzeraqEfR2_Z-P_6xtKlUVB</recordid><startdate>201301</startdate><enddate>201301</enddate><creator>Olsson, Roy H.</creator><creator>Bongsang Kim</creator><creator>Nguyen, Janet</creator><creator>Clews, Peggy</creator><creator>Pluym, Tammy</creator><creator>Wojciechowski, Kenneth E.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>201301</creationdate><title>Tuning the bandwidth and center frequency of micromechanical acoustic resonators</title><author>Olsson, Roy H. ; Bongsang Kim ; Nguyen, Janet ; Clews, Peggy ; Pluym, Tammy ; Wojciechowski, Kenneth E.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-ieee_primary_65250813</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2013</creationdate><topic>CMOS integrated circuits</topic><topic>Filter banks</topic><topic>III-V semiconductor materials</topic><topic>Microcavities</topic><topic>Radio frequency</topic><topic>Resonant frequency</topic><topic>Resonator filters</topic><toplevel>online_resources</toplevel><creatorcontrib>Olsson, Roy H.</creatorcontrib><creatorcontrib>Bongsang Kim</creatorcontrib><creatorcontrib>Nguyen, Janet</creatorcontrib><creatorcontrib>Clews, Peggy</creatorcontrib><creatorcontrib>Pluym, Tammy</creatorcontrib><creatorcontrib>Wojciechowski, Kenneth E.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Olsson, Roy H.</au><au>Bongsang Kim</au><au>Nguyen, Janet</au><au>Clews, Peggy</au><au>Pluym, Tammy</au><au>Wojciechowski, Kenneth E.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Tuning the bandwidth and center frequency of micromechanical acoustic resonators</atitle><btitle>2013 US National Committee of URSI National Radio Science Meeting (USNC-URSI NRSM)</btitle><stitle>USNC-URSI-NRSM</stitle><date>2013-01</date><risdate>2013</risdate><spage>1</spage><epage>1</epage><pages>1-1</pages><isbn>1467347760</isbn><isbn>9781467347761</isbn><eisbn>9781467347778</eisbn><eisbn>9781467347785</eisbn><eisbn>1467347787</eisbn><eisbn>1467347779</eisbn><abstract>As the radio frequency (RF) spectrum has become more crowded, the need for adaptable RF components, especially filters, has grown. Recently, aluminum nitride (AlN) microresonator filters have been reported. These filters/resonators are small (<1mm 3 ), have the high quality factors (>1000) desired for steep filter roll-off, can achieve many filters covering a very wide frequency span (kHz to GHz) on a single chip and can be monolithically integrated with CMOS transistors for reconfiguring the filter array. Using AlN microresonator on CMOS technology, miniature, adaptable RF filters based on banks of switched filters have recently been reported.</abstract><pub>IEEE</pub><doi>10.1109/USNC-URSI-NRSM.2013.6525081</doi></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISBN: 1467347760 |
| ispartof | 2013 US National Committee of URSI National Radio Science Meeting (USNC-URSI NRSM), 2013, p.1-1 |
| issn | |
| language | eng |
| recordid | cdi_ieee_primary_6525081 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | CMOS integrated circuits Filter banks III-V semiconductor materials Microcavities Radio frequency Resonant frequency Resonator filters |
| title | Tuning the bandwidth and center frequency of micromechanical acoustic resonators |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-03T21%3A51%3A59IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Tuning%20the%20bandwidth%20and%20center%20frequency%20of%20micromechanical%20acoustic%20resonators&rft.btitle=2013%20US%20National%20Committee%20of%20URSI%20National%20Radio%20Science%20Meeting%20(USNC-URSI%20NRSM)&rft.au=Olsson,%20Roy%20H.&rft.date=2013-01&rft.spage=1&rft.epage=1&rft.pages=1-1&rft.isbn=1467347760&rft.isbn_list=9781467347761&rft_id=info:doi/10.1109/USNC-URSI-NRSM.2013.6525081&rft_dat=%3Cieee_6IE%3E6525081%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=9781467347778&rft.eisbn_list=9781467347785&rft.eisbn_list=1467347787&rft.eisbn_list=1467347779&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=6525081&rfr_iscdi=true |