Growth of Li2B4O7 films on LiNbO3 and LiTaO3 substrates
Lithium niobate (LiNbO 3 : LN) and lithium tantalate (LiTaO 3 : LT) are widely used for bulk and surface acoustic wave devices because of their excellent piezoelectricity and high mechanical Q-factors. However, the frequency temperature coefficients (TCF) of these crystals are relatively large. On t...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Tagungsbericht |
Sprache: | eng |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Lithium niobate (LiNbO 3 : LN) and lithium tantalate (LiTaO 3 : LT) are widely used for bulk and surface acoustic wave devices because of their excellent piezoelectricity and high mechanical Q-factors. However, the frequency temperature coefficients (TCF) of these crystals are relatively large. On the contrary, lithium tetraborate (Li 2 B 4 O 7 : LBO) has high piezoelectricity and a positive TCF. We investigated a method of growing LBO single crystal films on LN and-/or LT substrates in order to achieve piezoelectric substrates with high electromechanical coupling and low TCF. |
---|---|
DOI: | 10.1109/EFTF.2012.6502331 |