Fabrication of a glass microfluidic device integrated with ultrasonic resonators

A glass microfluidic device integrated with ultrasonic resonators prepared by a Chemical Foaming Process is presented in this paper. The fabrication of the microfluidic device including glass micro cavities and channels with ultrasonic resonators integrated was introduced firstly. By the CFP process...

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Bibliographische Detailangaben

Hauptverfasser:	Wenlin Kuai, Jintang Shang, Wenlong Wei, Shunjin Qin, Tingting Wang, Jie Chen, Li Zhang, Lai, C. M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Abstracts Biology Biomedical optical imaging Glass Lead Optical resonators Transducers
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