Fabrication and testing of hemispherical MEMS wineglass resonators

This work focuses on understanding the behavior of 3D hemispherical shells operating in wineglass resonance mode through finite element modeling (FEM). Fabrication of the hemispherical shells was done using micromachining technique. The quality factor of the device was in excess of 10,000 when opera...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Pai, Pradeep, Chowdhury, F. K., Pourzand, H., Tabib-Azar, M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Asymmetry Conferences Devices Electrodes Fabrication Finite element method Finite element methods Gyroscopes Hemispherical shells Mathematical models Mechanical systems Micromachining Micromechanical devices Resonant frequency Sensors
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