Failure analysis case studies on open defect

Failure analysis (FA) plays an important role in the integrated circuit industry. In FA cases, leakage and open are two main types of electrical faults. Optical beam induced resistance change (OBIRCH) technique is a very effective method in locating the leakage related defects or at least pointing o...

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Bibliographische Detailangaben
Hauptverfasser: Song, G., Chunlei Wu, Yu, J., Gaojie Wen, Wang, W.
Format: Tagungsbericht
Sprache:eng
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