Integrated accelerometer with capacitance to digital interface circuit design based on monolithic 0.18μm CMOS MEMS technology

A monolithic accelerometer with integrated capacitance to digital readout circuit implemented in mixed-signal MEMS process is proposed to demonstrate sensor-to-bit integration. The sensing range is from -5g to 5g and the variation of the capacitance is from 441.2fF to 470fF. The sensitivity of the a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Chun-Chieh Wang, Long-Sheng Fan, Kuei-Ann Wen
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Accelerometers Capacitance Clocks CMOS integrated circuits Integrated circuit modeling Micromechanical devices Sensors
Online-Zugang:	Volltext bestellen
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